The measurement of tiny variations in local gravity enables the observation of subterranean features. Gravimeters have historically been extremely expensive instruments, but usable gravity measurements have recently been conducted using MEMS (microelectromechanical systems) sensors. Such sensors are cheap to produce, since they rely on the same fabrication techniques used to produce mobile phone accelerometers. A significant challenge in the development of MEMS gravimeters is maintaining stability over long time periods, which is essential for long term monitoring applications. A standard way to demonstrate gravimeter stability and sensitivity is to measure the periodic elastic distortion of the Earth due to tidal forces—the Earth tides. Here, a 19 day measurement of the Earth tides, with a correlation coefficient to the theoretical signal of 0.975, has been presented. This result demonstrates that this MEMS gravimeter is capable of conducting long-term time-lapse gravimetry, a functionality essential for applications such as volcanology.

Gravimeters are used to measure density anomalies under the ground. They are applied in many different fields from volcanology to oil and gas exploration, but present commercial systems are costly and massive. A new type of gravity sensor has been developed that utilises the same fabrication methods as those used to make mobile phone accelerometers. In this study, we describe the first results of a field-portable microelectromechanical system (MEMS) gravimeter. The stability of the gravimeter is demonstrated through undertaking a multi-day measurement with a standard deviation of $5.58\times {10}^{-6}$ ms ${}^{-2}$ . It is then demonstrated that a change in gravitational acceleration of $4.5\times {10}^{-5}$ ms ${}^{-2}$ can be measured as the device is moved between the top and the bottom of a 20.7 m lift shaft with a signal-to-noise ratio (SNR) of 14.25. Finally, the device is demonstrated to be stable in a more harsh environment: a $4.5\times {10}^{-4}$ ms ${}^{-2}$ gravity variation is measured between the top and bottom of a 275-m hill with an SNR of 15.88. These initial field-tests are an important step towards a chip-sized gravity sensor.

A microelectromechanical system (MEMS) gravimeter has been manufactured with a sensitivity of 40 ppb in an integration time of 1 s. This sensor has been used to measure the Earth tides: the elastic deformation of the globe due to tidal forces. No such measurement has been demonstrated before now with a MEMS gravimeter. Since this measurement, the gravimeter has been miniaturized and tested in the field. Measurements of the free-air and Bouguer effects have been demonstrated by monitoring the change in gravitational acceleration measured while going up and down a lift shaft of 20.7 m, and up and down a local hill of 275 m. These tests demonstrate that the device has the potential to be a useful field-portable instrument. The development of an even smaller device is underway, with a total package size similar to that of a smartphone. This article is part of a discussion meeting issue ‘The promises of gravitational-wave astronomy’.

Displacement sensors are found in a variety of applications including gravitational wave detectors, precision metrology, tissue imaging, gravimeters, microscopy and environmental monitoring. Most of these applications benefit from the use of displacement sensors that offer both high precision and stability. This is particularly the case for gravimetry where measurements are often taken over multi-day timescales. In this paper we describe a custom-built microcontroller-based displacement sensor that has been utilised in a micro-electromechanicalsystem (MEMS) gravimeter. The system runs off battery power and is low-cost, portable and lightweight. Using an optical shadow sensor technique, and by designing a digital lock-in amplier based around a dsPIC33 microcontroller, we demonstrate a displacement sensitivity of 10 nm/Hz down to 300 s, and an rms sensitivity of 1 nm over timescales of one day. The system also provides real time monitoring/control of temperature, using an AD7195 ratiometric bridge to provide mK control of three separate PT100 sensors. Furthermore, a tilt sensor conditioning circuit is incorporated to drive a pair of electrolytic tilt sensors, resulting in the ability to monitor 2 axis tilt at the level of 1 microradian over approximately 1 day. The sensor system described is thus multifunctional and capable of being incorporated into precision accelerometers/gravimeters, or indeed other applications where long term displacement/temperature monitoring is necessary.

This paper describes a technique for temperature sensitivity or thermal sag measurements of a geometric anti-spring based microelectromechanical system (MEMS) gravimeter (Wee-g). The Wee-g MEMS gravimeter is currently fabricated on a (100) silicon wafer using standard micro-nano fabrication techniques. The thermal behavior of silicon indicates that the Young’s modulus of silicon decreases with increase in temperature (∼64 ppm/K). This leads to a softening of the silicon material, resulting in the proof mass displacing (or sagging) under the influence of increasing temperature. It results in a change in the measured gravity, which is expressed as temperature sensitivity in terms of change in gravity per degree temperature. The temperature sensitivity for the silicon based MEMS gravimeter is found to be 60.14–64.87, 61.76, and 62.76 µGal/mK for experimental, finite element analysis (FEA) simulation, and analytical calculations, respectively. It suggests that the gravimeter's temperature sensitivity is dependent on the material properties used to fabricate the MEMS devices. In this paper, the experimental measurements of thermal sag are presented along with analytical calculations and simulations of the effect using FEA. The bespoke optical measurement system to quantify the thermal sag is also described. The results presented are an essential step toward the development of temperature insensitive MEMS gravimeters.