Silicon nitride photonics is on the rise owing to the broadband nature of the material, allowing applications of biophotonics, tele/datacom, optical signal processing and sensing, from visible, through near to mid-infrared wavelengths. In this paper, a review of the state of the art of silicon nitride strip waveguide platforms is provided, alongside the experimental results on the development of a versatile 300 nm guiding film height silicon nitride platform.
7 March 2019 in IEEE Journal of Selected Topics in Quantum Electronics
Photonic integration technologies have spread in the past decade by means of foundry models that mirror the electronic integrated circuit industry developments of the past century. Several monolithic technologies exist, based on silicon and III-V semiconductors. In this paper, we discuss the current state and forthcoming developments of open access photonic foundries whose technology platforms are based on silicon nitride material. The paper presents various silicon nitride technologies and foundries, alongside with access models supported by generic integration and process design kits. Technical features, enabled by different micro-fabrication processes and tools are summarized. Application examples and developments of forthcoming incorporation into these platforms are outlined.
In this paper the concept and design of an integrated optical device featuring evanescent field sensing and spectrometric analysis is presented. The device, termed integrated optics sensing spectrometer (IOSS), consists of a modified arrayed waveguide grating (AWG) which arms are engineered into two sets having different focal points. Half of the arms are exposed to the outer media, while the other half are left isolated, thus the device can provide both sensing and reference spectra. Two reference designs are provided for the visible and near-infrared wavelengths, aimed at the determination of the concentration of known solutes through absorption spectroscopy.