Silicon nitride photonics is on the rise owing to the broadband nature of the material, allowing applications of biophotonics, tele/datacom, optical signal processing and sensing, from visible, through near to mid-infrared wavelengths. In this paper, a review of the state of the art of silicon nitride strip waveguide platforms is provided, alongside the experimental results on the development of a versatile 300 nm guiding film height silicon nitride platform.
The performance of an interferometric device based on integrated Bimodal Waveguides (BiMW) for sensing is demonstrated. The sensors are fabricated using standard silicon technology and can achieve a detection limit of 2.5·10- 7 RIU for homogeneous sensing, rendering in a very high sensitive device. The applicability of the bimodal waveguide interferometer as label-free biosensor has been demonstrated by the real-time monitoring of the biomolecular interaction of BSA and antiBSA. Due to their simplicity, the interferometric devices could be further integrated in complete lab-on-a-chip platforms for point-of-care diagnostics showing them as a powerful instrument for biochemical analysis.
12 June 2006 in Journal of Optics A: Pure and Applied Optics
Offering open-access silicon photonics-based technologies has played a pivotal role in unleashing this technology from research laboratories to industry. Fabless enterprises rely on the open-access of these technologies for their product development. In the last decade, a diverse set of open-access technologies with medium and high technology readiness levels have emerged. This paper provides a review of the open-access silicon and silicon nitride photonic IC technologies offered by the pilot lines of European research institutes and companies. The paper also highlights upcoming features of these platforms and discusses how they address the long-term market needs.