The embedded ultra-precision displacement measurement is of great interest in developing high-end equipment as well as precision metrology. However, conventional interferometers only focus on measurement accuracy neglecting the sensor volume and requirement of embedded measurement, thus hindering their broad applications. Here we present a new sensing method for realizing large-range displacement measurement in narrow space scenarios based on the combination of a fiber microprobe interference-sensing model and precision phase-generated carrier. This is achieved by microprobe tilted-axis Gaussian optical field diffraction and high-order carrier demodulation to realize large-range displacement sensing. It is uncovered that the microprobe element misalignment and phase demodulation means play pivotal roles in the interference signal and the accuracy of large-range displacement sensing. The analysis shows that the proposed interference-sensing method can effectively reduce the nonlinearities. Experimental results illustrate that the measurement range extends from 0 to 700 mm. Furthermore, the maximum nonlinear error is reduced from tens of nanometers to 0.82 nm over the full range, allowing subnanometer accuracy for embedded measurements in the hundreds of millimeters range.

To improve the low-frequency isolation performance of optical platforms, an electromagnetic active-negative-stiffness generator (EANSG) was proposed, using nano-resolution laser interferometry sensors to monitor the micro-vibration of an optical platform, and precision electromagnetic actuators integrated with a relative displacement feedback strategy to counteract the positive stiffness of pneumatic springs within a micro-vibration stroke, thereby producing high-static-low-dynamic stiffness characteristics. The effectiveness of the method was verified by both theoretical and experimental analyses. The experimental results show that the vertical natural frequency of the optical platform was reduced from 2.00 to 1.37 Hz, the root mean square of displacement was reduced from 1.28 to 0.69 μm, and the root mean square of velocity was reduced from 14.60 to 9.33 μm/s, proving that the proposed method can effectively enhance the low frequency isolation performance of optical platforms.

A new scheme of super-resolution optical fluctuation imaging (SOFI) is proposed to broaden its application in the high-order case by separating the elimination of shot noise from the computation of cumulant, applying the low-pass denoising (LPD) operator to SOFI. The high-order cumulants are derived from a basic recursion of moments with the suppression of shot noise by the LPD on raw data. SOFI based on LPD (LPD-SOFI) demonstrates a 10.6-fold lateral resolution enhancement with the cumulant order of the 16th and a seven-fold three-dimensional resolution enhancement with the cumulant order of the 10th in experiments performed on a sparse sample of quantum dots.

Lateral resolution in confocal microscope is limited by the size of pinhole. In this paper, we attempt to introduce a new method to achieve structured detection through using spatial light modulator (SLM) to improve it. SLM modulates the Airy disk amplitude distribution according to the detection function in collection arm. Instead of using CCD to capture spot images and modulate them with numerical analysis in virtual structured detection (VSD), this method uses SLM to accomplish these aims with higher imaging rates. Based on simulation and the experiment results, it can be found that coherent transfer function expands and the resolution is 1.6 times as large as that of conventional confocal microscope.