The residual crack defects on the surface of potassium dihydrogen phosphate (KDP) crystals are the bottleneck that limits the improvement of laser damage resistance in the application of high-power laser devices. The multiple stress waves introduced by these residual surface lateral cracks on crystals under laser irradiation are the main inducement for damage extension and reduction of laser damage resistance. However, the coupling of these stress waves complicates their propagation in the crystal, and the interaction mechanism between each stress wave and laser damage has not been quantitatively characterized. Herein, a laser damage dynamic model for surface lateral cracks is constructed to reproduce the dynamic behaviors of the evolution of micro-defects to sub-millimeter damage pits under laser irradiation. Combined with the time-resolved pump and probe technique, the distribution of stress waves induced by lateral cracks was detected in situ to determine the type of stress waves. Then, the initiation and extension of laser damage were analyzed quantitatively to establish the correlations between different stress waves and damage extension. It is found that the longitudinal, shear, and Rayleigh waves induced by lateral cracks lead to large crush zones on the surface of KDP crystals, as well as butterfly-like damage sites accompanied by a large number of cracks at the bottom in the longitudinal section. The scale of the damage site can reach up to approximately 150 µm for lateral crack defects with large surface widths. This study ultimately reveals the physical mechanism of damage evolution induced by lateral cracks, providing effective guidance for developing control standards of surface crack defects during optical ultra-precision machining processes. This is of great significance for the improvement of laser damage resistance of KDP crystals in high-power laser systems.

Recently and interestingly, experiments show that the CO₂ laser conditioning can significantly increase the laser-induced damage threshold (LIDT) of fused silica optics, but its underlying mechanism has not been clearly revealed. This Letter reports the experimental studies on the evolution of the intrinsic point defects and intrinsic ring structures on the surface of fused silica optics under the CO₂ laser irradiation. The laser conditioning can effectively reduce the intrinsic defect contents in the surface layer of mechanically processed fused silica. However, the suppression effect of defects can be affected by the initial surface state. If there are micro-cracks on the component surface, the effect of the laser conditioning would be limited. The evolution of the intrinsic ring structures indicate that most of the intrinsic defects tend to recombine as short (Si–O)n ring structures during the laser healing of the micro-fractures. The observed recombination behavior and suppression of the intrinsic defects can help find out the reason for the increase of the LIDT of the fused silica optics.

Point defects with different species are concentrated on most mechanically machined fused silica optical surfaces with surface defects, which would sharply decrease the laser damage resistance under intense laser irradiation. Various point defects have distinct roles in affecting the laser damage resistance. Especially, the proportions of various point defects have not been identified, posing the challenge in relating the intrinsic quantitative relationship among various point defects. To fully reveal the comprehensive effect of various point defects, it is necessary to systematically explore the origins, evolution laws and especially the quantitative relationship among point defects. Herein, seven types of point defects are determined. The unbonded electrons in point defects are found to tend to be ionized to induce laser damage and there is a definite quantitative relationship between the proportions of oxygen-deficient point defects and that of peroxide point defects. The conclusions are further verified based on the photoluminescence (PL) emission spectra and the properties (e.g., reaction rule and structural feature) of the point defects. On basis of the fitted Gaussian components and electronic-transition theory, the quantitative relationship between PL and the proportions of various point defects is constructed for the first time. E’-Center accounts for the highest proportion among them. This work is beneficial for fully revealing the comprehensive action mechanisms of various point defects and providing new insights in elucidating the defect-induced laser damage mechanisms of optical components under intense laser irradiation from the atomic scale.

Damage tests are carried out at 1064nm to measure the laser resistance of TiO₂/Al₂O₃and HfO₂/Al₂O₃ antireflection coatings grown by atomic layer deposition (ALD). The damage results are determined by S-on-1 and R-on-1 tests. Interestingly, the damage performance of ALD coatings is similar to those grown by conventional e-beam evaporation process. A decline law of damage resistance under multiple irradiations is revealed. The influence of growth temperature on damage performance has been investigated. Result shows that the crystallization of TiO₂ layer at higher temperature could lead to numerous absorption defects that reduce the laser-induced damage threshold (LIDT). In addition, it has been found that using inorganic compound instead of organic compound as precursors for ALD process maybe effectively prevent carbon impurities in films and will increase the LIDT obviously.

The traditional polishing method inevitably results in subsurface cracks in the fused silica, which seriously degrades their ultraviolet laser damage resistance. CO₂ laser irradiation can melt these cracks and improve their laser induced damage threshold (LIDT). Photoluminescence spectrum and SEM-FIB were employed to investigate the changes in the material microstructure at the crack location with CO₂ laser melting. The density of the oxygen-deficient centers of type II (ODC II) defects decreases, while the density of the non-bridging oxygen hole center (NBOHC) defects increases after high-temperature melting. The reason for this change is related to the dihydroxylation reaction and the participation of environmental oxygen in the defect type conversion. The reduction of ODC II defects is most likely the reason for the improvement of LIDT.

The machining-induced cracks and other defects on the surface of fused silica would incur damage when irradiated by intense lasers, which greatly shortens the service life of the fused silica optical components. The high absorption coefficient of fused silica for far-infrared lasers makes it possible to use low-energy CO₂ lasers to melt and heal micro defects on the surface, and hence improve its damage threshold under the service conditions of extremely intense laser. However, the air in the cracks may evolve into bubbles during the laser healing process, but the law of crack morphology evolution and the bubble formation mechanism have not been clearly revealed. In this work, a simulation model of the healing process of fused silica surface cracks under the effect of low-energy CO₂ laser is established. Three bubble formation mechanisms (i.e., the uneven fluidity caused by temperature gradient, the collapse effect caused by inclined cracks, and the internal cracks) are identified based on the simulation results of cracks with various original morphologies and characteristic structural parameters. The simulated fused silica morphology is consistent with the results of the laser healing experiment. This work can provide theoretical guidance for the optimization of optical manufacturing parameters of fused silica, as well as the CO₂ laser healing and polishing strategies.