Graphene is being increasingly used as an interesting transducer membrane in micro- and nanoelectromechanical systems (MEMS and NEMS, respectively) due to its atomical thickness, extremely high carrier mobility, high mechanical strength, and piezoresistive electromechanical transductions. NEMS devices based on graphene feature increased sensitivity, reduced size, and new functionalities. In this review, we discuss the merits of graphene as a functional material for MEMS and NEMS, the related properties of graphene, the transduction mechanisms of graphene MEMS and NEMS, typical transfer methods for integrating graphene with MEMS substrates, methods for fabricating suspended graphene, and graphene patterning and electrical contact. Consequently, we provide an overview of devices based on suspended and nonsuspended graphene structures. Finally, we discuss the potential and challenges of applications of graphene in MEMS and NEMS. Owing to its unique features, graphene is a promising material for emerging MEMS, NEMS, and sensor applications.

The advent of the 5G era means that the concepts of robot, VR/AR, UAV, smart home, smart healthcare based on IoT (Internet of Things) have gradually entered human life. Since then, intelligent life has become the dominant direction of social development. Humidity sensors, as humidity detection tools, not only convey the comfort of human living environment, but also display great significance in the fields of meteorology, medicine, agriculture and industry. Graphene-based materials exhibit tremendous potential in humidity sensing owing to their ultra-high specific surface area and excellent electron mobility under room temperature for application in humidity sensing. This review begins with the introduction of examples of various synthesis strategies of graphene, followed by the device structure and working mechanism of graphene-based humidity sensor. In addition, several different structural design methods of graphene are summarized, demonstrating the structural design of graphene can not only optimize the performance of graphene, but also bring significant advantages in humidity sensing. Finally, key challenges hindering the further development and practical application of high-performance graphene-based humidity sensors are discussed, followed by presenting the future perspectives.

Most of the existing low-light image enhancement methods suffer from the problems of detail loss, color distortion and excessive noise. To address the above-mentioned issues, this paper proposes a neural network-based low-light image enhancement network. The network is divided into three parts: decomposition network, reflection component denoising network, and illumination component enhancement network. In the decomposition network, the input image is decomposed into a reflection image and an illumination image. In the reflection component denoising network, the Unet3+ network improved by fusion CA attention is adopted to denoise the reflection image. In the illumination component enhancement network, the adaptive mapping curve is adopted to enhance the illumination image iteratively. Finally, the processed illumination and reflection images are fused based on Retinex theory to obtain the final enhanced image. The experimental results show that the proposed network achieves excellent visual effects in subjective evaluation. Additionally, it shows a significant improvement in objective evaluation metrics, including PSNR, SSIM, NIQE, and so on, when compared to the results in several public datasets.

A flexible humidity sensor based on MoS₂/GO was realized with a high responsivity of 98%, a fast response/recovery time of 1.3/12.1 s, and excellent stability and linearity. It was applied for human respiration and fingertip proximity detection.

Graphene ribbons with a suspended proof mass for nanomechanical systems have been rarely studied. Here, we report three types of nanomechanical devices consisting of graphene ribbons (two ribbons, four ribbons-cross and four ribbons-parallel) with suspended Si proof masses and studied their mechanical properties. The resonance frequencies and built-in stresses of three types of devices ranged from tens of kHz to hundreds of kHz, and from 82.61 MPa to 545.73 MPa, respectively, both of which decrease with the increase of the size of proof mass. The devices with four graphene ribbons featured higher resonance frequencies and spring constants, but lower built-in stresses than two ribbon devices under otherwise identical conditions. The Young’s modulus and fracture strain of double-layer graphene were measured to be 0.34 TPa and 1.13% respectively, by using the experimental data and finite element analysis (FEA) simulations. Our studies would lay the foundation for understanding of mechanical properties of graphene ribbons with a suspended proof mass and their potential applications in nanoelectromechanical systems.

The mechanical characteristics of graphene ribbons with an attached proof mass that can be used as NEMS transducers have been minimally studied, which hinders the development of graphene-based NEMS devices. Here, we simulated the mechanical characteristics of graphene ribbons with an attached proof mass using the finite element method. We studied the impact of force, residual stress, and geometrical size on displacement, strain, resonant frequency, and fracture strength of graphene ribbons with an attached proof mass. The results show that the increase of width and thickness of graphene ribbons would result in a decrease of the displacement and strain but also an increase of resonant frequency. The increase of the length of graphene ribbons has an insignificant impact on the strain, but it could increase the displacement and decrease the resonant frequency. The increase of residual stress in the graphene ribbons decreases its strain and displacement. The estimated fracture strength of graphene shows limited dependence on its thickness, with an estimated value of around 148 GPa. These findings contribute to the understanding of the mechanical characteristics of graphene ribbons with an attached proof mass and lay the solid foundation for the design and manufacture of high-performance graphene-based NEMS devices such as accelerometers.