The rapid development of flexible sensor technology has made flexible sensor arrays a key research area in various applications due to their exceptional flexibility, wearability, and large-area-sensing capabilities. These arrays can precisely monitor physical parameters like pressure and strain in complex environments, making them highly beneficial for sectors such as smart wearables, robotic tactile sensing, health monitoring, and flexible electronics. This paper reviews the fabrication processes, operational principles, and common materials used in flexible sensors, explores the application of different materials, and outlines two conventional preparation methods. It also presents real-world examples of large-area pressure and strain sensor arrays. Fabrication techniques include 3D printing, screen printing, laser etching, magnetron sputtering, and molding, each influencing sensor performance in different ways. Flexible sensors typically operate based on resistive and capacitive mechanisms, with their structural designs (e.g., sandwich and fork-finger) affecting integration, recovery, and processing complexity. The careful selection of materials—especially substrates, electrodes, and sensing materials—is crucial for sensor efficacy. Despite significant progress in design and application, challenges remain, particularly in mass production, wireless integration, real-time data processing, and long-term stability. To improve mass production feasibility, optimizing fabrication processes, reducing material costs, and incorporating automated production lines are essential for scalability and defect reduction. For wireless integration, enhancing energy efficiency through low-power communication protocols and addressing signal interference and stability are critical for seamless operation. Real-time data processing requires innovative solutions such as edge computing and machine learning algorithms, ensuring low-latency, high-accuracy data interpretation while preserving the flexibility of sensor arrays. Finally, ensuring long-term stability and environmental adaptability demands new materials and protective coatings to withstand harsh conditions. Ongoing research and development are crucial to overcoming these challenges, ensuring that flexible sensor arrays meet the needs of diverse applications while remaining cost-effective and reliable.

In this work, a capacitive pH sensor consisting of Ta₂O₅ functional film is designed and fabricated by employing MEMS-based procedures. The Ta₂O₅ thin film has an amorphous microstructure, and its surface roughness is less than 3.17 nm. A signal processing circuit and a software filtering algorithm are also designed to measure the pH value, thus improving the detection accuracy and anti-interference ability. Good linearity (R² = 0.99904) and sensitivity (63.12 mV/pH) are recorded for the proposed sensing element in the range of pH 2~12. In addition, the sensor’s drift and hysteresis are equal to 5.1 mV and 5.8 mV, respectively. The enhanced sensing performance in combination with the facile miniaturization process, low fabrication cost, and suitability for mass production render the fabricated sensor attractive for applications where pH change measurements in a water environment are required.

The emerging field of flexible tactile sensing systems, equipped with multi-physical tactile sensing capabilities, holds vast potential across diverse domains such as medical monitoring, robotics, and human–computer interaction. In response to the prevailing challenges associated with the limited integration and sensitivity of flexible tactile sensors, this paper introduces a versatile tactile sensing system capable of concurrently monitoring temperature and pressure. The temperature sensor employs carbon nanotube/graphene conductive paste as its sensitive material, while the pressure sensor integrates an ionic gel containing boron nitride as its sensitive layer. Through the application of cost-effective screen printing technology, we have successfully manufactured a flexible dual-mode sensor with exceptional performance, featuring high sensitivity (804.27 ${\mathrm{kPa}}^{-1}$), a broad response range (50 kPa), rapid response time (17 ms), and relaxation time (34 ms), alongside exceptional durability over 5000 cycles. Furthermore, the resistance temperature coefficient of the sensor within the temperature range of 12.5 °C to 93.7 °C is −0.17% °C⁻¹. The designed flexible dual-mode tactile sensing system enables the real-time detection of pressure and temperature information, presenting an innovative approach to electronic skin with multi-physical tactile sensing capabilities.