The paper proposes a technology based on UV-LIGA process for microoptoelectromechanical systems (MOEMS) manufacturing. We used the original combination of materials and technological steps, in which any of the materials does not enter chemical reactions with each other, while all of them are weakly sensitive to the effects of oxygen plasma. This made it suitable for long-term etching in the oxygen plasma at low discharge power with the complete preservation of the original geometry, including small parts. The micromembranes were formed by thermal evaporation of Al. This simplified the technique compared to the classic UV-LIGA and guaranteed high quality and uniformity of the resulting structure. To demonstrate the complete process, a test MOEMS with electrostatic control was manufactured. On one chip, a set of micromembranes was created with different stiffness from 10 nm/V to 100 nm/V and various working ranges from 100 to 300 nm. All membranes have a flat frequency response without resonant peaks in the frequency range 0–200 kHz. The proposed technology potentially enables the manufacture of wide low-height membranes of complex geometry to create microoptic fiber sensors.

This study proposes a method for interferometric fiber optic sensor readouts. The method utilizes the advantages of the active homodyne demodulation technique and low-coherence interferometry. The usage of the tandem low-coherence interferometer enables modulating the reference interferometer without any changes to the sensor. This achieves high sensitivity, high stability, and a wide frequency band. A sensitivity of up to 0.1 nm (RMS) in the frequency range of 5 kHz is demonstrated by detecting acoustic signals with a fiber Michelson interferometer as a sensor.

This study proposes a method for detecting small-length fluctuations for fiber-optic sensors (FOS). The method is based on a tracking tandem low-coherence interferometer and enables the ability to compensate for temperature and deformation drifts in FOS. As a result, the constant high sensitivity of FOS over a wide frequency range is guaranteed. Sensitivity to the level of 2 nm in the frequency range of 200 kHz has been demonstrated. The operation of the circuit is demonstrated on the example of the 2D location of acoustic signals using a correlation algorithm for signal processing, known as the time reversal method. It is shown that this system enables us to determine the place of the impact on the sample under the test with an accuracy of about 2 cm using a single sensor.

Stable subphthalocyanine-type dyes with a high electron affinity attract much attention as potential substitutes for traditional fullerenes in molecular electronics devices. One possible way to enhance the acceptor properties of the subphthalocyanine core is by replacing the peripheral benzene fragments (C₆H₄) with 1,2,5-thiadiazole fragments (C₂N₂S₁). However, the resistance of these materials to light or atmospheric effect remains an open question, which limits their further application in device manufacturing. In this work, we compare vacuum-deposited films of three derivatives, SubPzS₃H₀ (all peripheral fragments are 1,2,5-thiadiazoles), SubPzS₂H₄ (two fragments are 1,2,5-thiadiazoles and one fragment is benzene), and SubPcS₀H₁₂ (all benzenes, i.e., parent subphthalocyanine). Practically relevant substrates were used for deposition, namely, bare glass, glass/ITO or FTO, and PET/ITO. Photobleaching of films under continuous 1 sun illumination was studied in laboratory air, synthetic air, and ultrapure argon. It is shown that the exclusion of near-UV photons from the incident light spectrum, which corresponds to the absorption of subphthalocyanines in the Soret-band, strongly inhibits degradation. Absorption in the Q-band range initiates soft annealing rather than photobleaching of films. The stability of the films deposited on glass decreases as SubPzS₃H₀ > SubPzS₂H₄ > SubPcS₀H₁₂ in air, and vice versa in argon. The substrate adds more complexity to this picture. In argon, the ITO coating reduces degradation of all of the compounds equally, in contrast to the glass samples, while in air, the SubPzS₃H₀ films discolor completely. The latter reaction proceeds due to the indium-containing species migrating from the conductive coating.

The paper considers the possibility of using the diamond-silicon carbide composite Skeleton^® with a technological coating of polycrystalline silicon as a substrate for X-ray mirrors used with powerful synchrotron radiation sources (third+ and fourth generation). Samples were studied after polishing to provide the following surface parameters: root-mean-square flatness ≃ 50 nm, micro-roughness on the frame 2 µm × 2 µm σ ≃ 0.15 nm. The heat capacity, thermal conductivity and coefficient of linear thermal expansion were investigated. For comparison, a monocrystalline silicon sample was studied under the same conditions using the same methods. The value of the coefficient of linear thermal expansion turned out to be higher than that of monocrystalline silicon and amounted to 4.3 × 10⁻⁶ K⁻¹, and the values of thermal conductivity (5.0 W cm⁻¹ K⁻¹) and heat capacity (1.2 J K⁻¹ g⁻¹) also exceeded the values for Si. Thermally induced deformations of both Skeleton^® and monocrystalline silicon samples under irradiation with a CO₂ laser beam have also been experimentally studied. Taking into account the obtained thermophysical constants, the calculation of thermally induced deformation under irradiation with hard (20 keV) X-rays showed almost three times less deformation of the Skeleton^® sample than of the monocrystalline silicon sample.

The development of optical methods for surface vibration measurements is currently of great interest. We propose a modified tandem low-coherence technique that utilizes the phase information of the low-coherence signal to detect surface vibrations. The resolution of this scheme is less than 1 nm for a 20 kHz bandwidth. The proposed technique is not just limited to measurements of surface vibrations, but it can also be used for interferometric fiber-optic sensors.