The paper proposes a technology based on UV-LIGA process for microoptoelectromechanical systems (MOEMS) manufacturing. We used the original combination of materials and technological steps, in which any of the materials does not enter chemical reactions with each other, while all of them are weakly sensitive to the effects of oxygen plasma. This made it suitable for long-term etching in the oxygen plasma at low discharge power with the complete preservation of the original geometry, including small parts. The micromembranes were formed by thermal evaporation of Al. This simplified the technique compared to the classic UV-LIGA and guaranteed high quality and uniformity of the resulting structure. To demonstrate the complete process, a test MOEMS with electrostatic control was manufactured. On one chip, a set of micromembranes was created with different stiffness from 10 nm/V to 100 nm/V and various working ranges from 100 to 300 nm. All membranes have a flat frequency response without resonant peaks in the frequency range 0–200 kHz. The proposed technology potentially enables the manufacture of wide low-height membranes of complex geometry to create microoptic fiber sensors.

A receiver based on a low-barrier diode has been developed for use in a 94 GHz frequency-modulated continuous-wave radar. The receiver has a very simple design with the radio frequency (RF) front-end consisting of only a mixing diode mounted on a planar slot antenna. The low-barrier diode operates at a zero bias, thus the RF front-end does not require any power supply. A transimpedance amplifier transforms the mixer intermediate frequency current to voltage, which is the output signal of the receiver module. The receiver works at a low local oscillator (LO) power keeping conventional performance: a noise-equivalent power of 1.4×10 $^{-19}$ W/Hz at a LO power of 0.1 mW is achieved.

This study proposes a method for interferometric fiber optic sensor readouts. The method utilizes the advantages of the active homodyne demodulation technique and low-coherence interferometry. The usage of the tandem low-coherence interferometer enables modulating the reference interferometer without any changes to the sensor. This achieves high sensitivity, high stability, and a wide frequency band. A sensitivity of up to 0.1 nm (RMS) in the frequency range of 5 kHz is demonstrated by detecting acoustic signals with a fiber Michelson interferometer as a sensor.

A new approach to millimeter-wave imaging was suggested and experimentally studied. This approach can be considered as the evolution of the well-established focal-plane array (FPA) millimeter-wave imaging. The significant difference is the use of a direct-conversion array receiver, instead of the direct-detection array receiver, along with the frequency-modulated continuous-wave (FMCW) radar technique. The sensitivity of the direct-conversion receiver is several orders higher than the sensitivity of the direct-detection one, which allows us to increase the maximum imaging range by more than one order of magnitude. The additional advantage of the direct-conversion technique is the opportunity to obtain information about the range to an object. The realization of the direct-conversion FPA imaging system was made possible due to original sensitive simple-designed receiving elements based on low-barrier Mott diodes. The suggested imaging method’s main characteristics, which include the achievable angular and range resolution and the achievable maximum imaging range, were studied. A maximum range of up to 100 m was experimentally determined. A 94 GHz 8 × 8 imaging system was developed for demonstration purposes and studied in detail. The suggested technique is assumed to be useful for creating a long-range millimeter-wave camera, in particular, for robotic systems that operate in poor environmental conditions.

This study proposes a method for detecting small-length fluctuations for fiber-optic sensors (FOS). The method is based on a tracking tandem low-coherence interferometer and enables the ability to compensate for temperature and deformation drifts in FOS. As a result, the constant high sensitivity of FOS over a wide frequency range is guaranteed. Sensitivity to the level of 2 nm in the frequency range of 200 kHz has been demonstrated. The operation of the circuit is demonstrated on the example of the 2D location of acoustic signals using a correlation algorithm for signal processing, known as the time reversal method. It is shown that this system enables us to determine the place of the impact on the sample under the test with an accuracy of about 2 cm using a single sensor.

This paper proposes and implements a novel scheme for recording signals from fibre optic sensors based on tandem low-coherence interferometry with an integrated optical reference interferometer. The circuit allows precision control of the phase shift. Additionally, the paper illustrates the potential for detecting vibration and object deformation using fibre optic Fabry–Perot sensors connected to the registration system.