This paper proposes a high sensitivity electric field microsensor (EFM) based on torsional resonance. The proposed microsensor adopts torsional shutter, which is composed of shielding electrodes and torsional beams. The movable shielding electrodes and the fixed sensing electrodes are fabricated on the same plane and interdigitally arranged. Push–pull electrostatic actuation method is employed to excite the torsional shutter. Simulation results proved that the torsional shutter has higher efficiency of charge induction. The optimization of structure parameters was conducted to improve its efficiency of charge induction further. A micromachining fabrication process was developed to fabricate the EFM. Experiments were conducted to characterize the EFM. A good linearity of 0.15% was achieved within an electrostatic field range of 0–50 kV/m, and the uncertainty was below 0.38% in the three roundtrip measurements. A high sensitivity of 4.82 mV/(kV/m) was achieved with the trans-resistance of 100 MΩ, which is improved by at least one order of magnitude compared with previously reported EFMs. The efficiency of charge induction for this microsensor reached 48.19 pA/(kV/m).

High-altitude electric fields are a critical parameter of electricity in the atmosphere. Due to such drawbacks as their bulk and high cost, traditional electric field mills are not available for daily atmospheric sounding purposes. This paper introduces a highly sensitive and robust electric field sounding sensor based on an existent micro-electro-mechanical systems chip and a new protective package that augments sensor sensitivity. To gain high sensitivity, an innovative external metal electrode connects to the electric field microchip's package cap, hangs down out of the guardian foam, and effectively enhances the local electric field near the microchip due to the distortion effect. This distortion regularity was studied during a series of finite element simulations, calibrations, and comparison experiments. With a 1.5-meter-long external electrode, the sensitivity of the sensor reached 465 mV/kV/m with a resolution that was better than 10 V/m in an actual long-term ground comparison test. Furthermore, the microsensor chip and its circuit are protected inside a foam while the metal electrode is exposed outside, therefore gaining a robust stability during harsh environments such as low temperature, rainfall, etc. To examine the performances, we built an electric field sounding system, including the electric field sensor, a radiosonde, and a receiving antenna, and measured high-altitude electric fields in various weather conditions. Intended for atmospheric electricity research, our innovative electric field sounding sensor would be especially propitious if integrated with a radiosonde and applicable to daily sounding services.

One of the major concerns in the development of three-dimensional (3D) electric field sensors (EFSs) is their susceptibility to cross-axis coupling interference. The output signal for each sensing axis of a 3D EFS is often coupled by electric field components from the two other orthogonal sensing axes. In this paper, a one-dimensional (1D) electric field sensor chip (EFSC) with low cross-axis coupling interference is presented. It is designed to be symmetrical, forming a pair of in-plane symmetrically-located sensing structures. Using a difference circuit, the 1D EFSC is capable of sensing parallel electric fields along symmetrical structures and eliminating cross-axis coupling interference, which is contrast to previously reported 1D EFSCs designed for perpendicular electric field component measurement. Thus, a 3D EFS with low cross-axis coupling interference can be realized using three proposed 1D EFSCs. This 3D EFS has the advantages of low cross-axis coupling interference, small size, and high integration. The testing and calibration systems of the proposed 3D EFS were developed. Experimental results show that in the range of 0–120 kV/m, cross-axis sensitivities are within 5.48%, and the total measurement errors of this 3D EFS are within 6.16%.

This paper proposes an electric field microsensor (EFM) with mutual shielding electrodes. Based on the charge-induction principle, the EFM consists of fixed electrodes and piezoelectric-driving vertically-movable electrodes. All the fixed electrodes and movable electrodes work as both sensing electrodes and shielding electrodes. In other words, all the fixed and movable electrodes are sensing electrodes, and they are mutually shielding electrodes simultaneously. The movable electrodes are driven to periodically modulate the electric field distribution at themselves and the fixed electrodes, and the induced currents from both movable and fixed electrodes are generated simultaneously. The electrode structure adopts an interdigital structure, and the EFM has been simulated by finite element methods. Simulation results show that, since the sensing area of this EFM is doubled, the variation of induced charge is twice, and therefore the output signal of the sensor is increased. The piezoelectric material, lead zirconate titanate (PZT), is prepared by the sol–gel method, and the microsensor chip is fabricated.

A non-interference AC voltage measurement system based on a resonant electric field microsensor is proposed. The equivalent circuit of the proposed system is established, which shows that the frequency response function is only related to the capacitances of the system structure in the kHz low-frequency range. Furthermore, the sensitivity analysis and experiments demonstrate that the amplitude sensitivity is independent of the frequency of an unknown AC voltage. Therefore, this technique is very suitable for measuring arbitrary waveform voltage. A functional prototype was developed and tested to acquire AC power-line voltages. The prototype responded well to the transient waveform of the AC input signal, yet with a phase delay of 177.24°. The output of the system was linear in the range of 0–1000 V_rms at 50-Hz and the linearity was 0.54%, whereas the maximum relative deviation of the rms voltage measurements above 10 V was −0.83%. Finally, the shielding ability of the system against interference and noise was verified through the AC interference voltage measurement.

Electric field sensors (EFSs) are widely used in various fields, particularly in accurately assessing atmospheric electric fields and high-voltage power lines. Precisely detecting electric fields enhances the accuracy of weather forecasting and contributes to the safe operation of power grids. This paper comprehensively reviews the development of micro-electromechanical system (MEMS) resonant EFSs, including theoretical analysis, working principles, and applications. MEMS resonant EFSs have developed into various structures over the past decades. They have been reported to measure electric field strength by detecting changes in the induced charge on the electrodes. Significant advancements include diverse driving and sensing structures, along with improved dynamic range, sensitivity, and resolution. Recently, mode localization has gained attention and has been applied to electric field sensing. This paper reviews the performances and structures of MEMS resonant EFSs over recent decades and highlights recent advances in weakly coupled resonant EFSs, offering comprehensive guidance for researchers.