Zhaozhi Chu received the B.S. degree in microelectronics from Tsinghua University, Beijing, China, in 2013 and the Ph.D. degree in physical electronics from the Institute of Electronics, Chinese Academy of Sciences, Beijing, China, in 2018. He is currently an associate professor with the Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China. His research interest includes electric field microsensors, MEMS device fabrication and package, and the development of microsystems.
Research Keywords & Expertise
MEMS
electrostatic field
microsystem
electric field distrib...
electric field sensor
Short Biography
Zhaozhi Chu received the B.S. degree in microelectronics from Tsinghua University, Beijing, China, in 2013 and the Ph.D. degree in physical electronics from the Institute of Electronics, Chinese Academy of Sciences, Beijing, China, in 2018. He is currently an associate professor with the Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China. His research interest includes electric field microsensors, MEMS device fabrication and package, and the development of microsystems.