In this paper, a MgO-based high-temperature Fabry-Perot (F-P) vibration sensor with a fiber-optic collimator is proposed and experimentally demonstrated at 1000 °C. The sensor is composed of a sensing unit and a fiber-optic collimator. The F-P cavity is formed by the upper surface of the inertial mass block and the countersunk hole of the cover layer. The length of the F-P cavity changes with external vibrations. The sensing unit is prepared by wet etching technology and three-layer direct bonding technology, which ensure its stability and reliability in high-temperature environments. The experimental results indicate that the sensor can operate stably within a range from room temperature up to 1000 °C. The sensitivity and non-linearity of the sensor at 1000 °C are 1.3224 nm/g and 3.8%, respectively. Furthermore, the sensor operates at frequencies of up to 4 kHz while remaining unaffected by lateral vibration signals. The high-temperature F-P vibration sensor can effectively deal with the fiber damage in extreme environments and exhibits considerable potential for widespread applications.

To address the demand for underwater acoustic detection with hydrostatic pressure resistance, this paper proposes a fiber-optic Fabry–Perot (F-P) underwater acoustic sensor based on micro-electromechanical system (MEMS) technology. According to the F-P interference principle, the diaphragm deforms under acoustic pressure, inducing variations in the F-P cavity length which modulate the interference spectrum and enable the measurement of underwater acoustic signals. A sensing diaphragm with a composite structure consisting of a central boss and a micro-hole array is designed, which improves the optical signal quality while reducing the influence of the pressure difference between the inner and outer surfaces of the diaphragm on sensor operation. MEMS fabrication, computer numerical control (CNC) machining, and laser fusion splicing technologies are employed to achieve batch fabrication of the sensing units and adhesive-free integration of the sensor. Experimental results show that the proposed sensor exhibits a flat frequency response within ±1.5 dB over the range of 1 kHz to 10 kHz, with an average signal-to-noise ratio (SNR) of 86.35 dB. The sensitivity reaches −181.79 dB re 1 rad/μPa at 10 kHz, with a maximum nonlinearity of 0.48% F.S., a repeatability error of 0.15% F.S. and a dynamic range of 100.83 dB. The proposed sensor features miniaturization, high consistency, hydrostatic pressure self-balancing capability, and immunity to electromagnetic interference, providing a solid foundation for hydrostatic-pressure-resistant underwater acoustic measurements in deep-sea environments.

To address the critical challenges of edge chipping and poor processing quality in sapphire precision dicing, this paper proposes a femtosecond laser filamentation-guided dicing technology. By systematically investigating the influence of pulse overlap rate, energy, and scan counts on damage evolution, the physical differences between 343 nm UV and 515 nm visible lasers in suppressing plasma shielding and breaking through processing saturation limits are revealed. The results indicate that an extremely high pulse overlap rate (>98%) significantly inhibits lateral energy dissipation and drives the efficient propagation of the filament deep along the optical axis; furthermore, the 343 nm laser demonstrates superior removal rates and localisation compared to the 515 nm laser. Using super-resolution imaging, the precision cleavage cross-section is clearly categorised into four evolutionary stages: general ablation, filament ablation, transition, and mechanical cleavage. To mitigate morphological degradation induced by multiple scans, a sacrificial-layer-assisted strategy is innovatively proposed to achieve spatial damage transfer and in situ self-polishing, effectively eliminating longitudinal damage striations and residual stress-induced hackles. Finally, taper-free, high-precision separation of 1 mm × 450 μm micro-units is successfully achieved on a 220-μm-thick sapphire wafer. This technology not only achieves ultra-low-loss dicing but also establishes a highly efficient, contamination-free in situ characterisation paradigm for buried structures in hard and brittle materials.

Conventional fabrication methods for fiber Bragg grating (FBG) struggle to simultaneously enhance the bandwidth and the side mode suppression ratio (SMSR), which limits their applications in photonic systems and sensing systems. We propose a femtosecond laser edge-constrained composite apodization method for simultaneously enhancing the bandwidth and SMSR of FBGs. Building on the multi-layer composite apodization technique, this method simultaneously controls the position and length of the writing lines to constrain the coupling strength at both edges of the FBG, thereby expanding bandwidth while improving SMSR. The writing results show that, compared with the unconstrained case, the SMSR of the edge-constrained composite apodized FBG (ECAFBG) improves by approximately 4.7 dB while maintaining an essentially unchanged bandwidth of 3.7 nm and undegraded reflectivity, with a length of only 0.7 mm. Dynamic strain and intensity demodulation is applied to the ECAFBG. The results demonstrate that the ECAFBG is capable of dynamic strain measurement over a relatively large range. The proposed method provides an effective approach to simultaneously achieve short-length FBGs with wide bandwidth and high SMSR and has potential applications in compact laser and sensing devices.