In this study, thermo-compression(TC) and vacuum reflow(VR) bonding processes of fine pitch interconnection were optimized using Type 7 Sn-3.0Ag-0.5Cu solder paste. A chip with Cu pillar Sn-2.5Ag bumps and BT substrate with ENEPIG surface finish were used, and the thickness and the aperture ratio of the metal mask were 30 ㎛/50 ㎛ and 70%/100%, respectively. As a result of optimizing the printing process, a metal mask with a thickness of 30 ㎛ and an aperture ratio of 100% was selected. As a result of the TC and VR bonding processes optimization, Cu6Sn5 and (Cu,Ni)6Sn5 IMC layers were formed on the top and bottom of the solder joint, respectively. In the conventional TC process sample, the thickness of the solder was measured to be 4.1 ㎛, and the IMC thickness ratio was calculated to be 40%. Also, in the TC and VR process samples with solder paste, the thickness of the solder was measured to be 6.5 ㎛ and 10.3 ㎛, respectively, and the ratio of the IMC thickness was calculated to be about 32% and 43%. It was expected that it would be beneficial to reliability by reducing the occurrence and propagation of cracks in the solder joint due to the effect of lowering the IMC thickness ratio as the volume of the solder becomes larger than that of the conventional TC process.