This paper reports on the deposition and characterization of piezoelectric Al_XSc_1-XN (further: AlScN) films on Si substrates using AlSc alloy targets with 30 at.% Sc. Films were deposited on a Ø200 mm area with deposition rates of 200 nm/min using a reactive magnetron sputtering process with a unipolar–bipolar hybrid pulse mode of FEP. The homogeneity of film composition, structural properties and piezoelectric properties were investigated depending on process parameters, especially the pulse mode of powering in unipolar–bipolar hybrid pulse mode operation. Characterization methods include energy-dispersive spectrometry of X-ray (EDS), X-ray diffraction (XRD), piezoresponse force microscopy (PFM) and double-beam laser interferometry (DBLI). The film composition was Al_0.695Sc_0.295N. The films showed good homogeneity of film structure with full width at half maximum (FWHM) of AlScN(002) rocking curves at 2.2 ± 0.1° over the whole coating area when deposited with higher share of unipolar pulse mode during film growth. For a higher share of bipolar pulse mode, the films showed a much larger c-lattice parameter in the center of the coating area, indicating high in-plane compressive stress in the films. Rocking curve FWHM also showed similar values of 1.5° at the center to 3° at outer edge. The piezoelectric characterization method revealed homogenous d_33,f of 11–12 pm/V for films deposited at a high share of unipolar pulse mode and distribution of 7–10 pm/V for a lower share of unipolar pulse mode. The films exhibited ferroelectric switching behavior with coercive fields of around 3–3.5 MV/cm and polarization of 80–120 µC/cm².

Pulse-magnetron-sputtered long-term superhydrophilic coatings have been synthesized to functionalize the surfaces of solid-state cooling devices, e.g., electrocaloric heat pumps, where not only a complete wetting of the surface by a fluid is intended, but also fast wetting and dewetting processes are required. The coatings consist of a (Ti,Si)O₂ outer layer that provides lasting hydrophilicity thanks to the mesoporous structure, followed by an intermediate WO₃ film that enables the reactivation of the wettability through visible light irradiation, and a W underlayer which can work as a top electrode of the electrocaloric components thanks to its suitable electrical and thermal conductivity properties. Process parameter optimization for each layer of the stack as well as the influence of the microstructure and composition on the wetting properties are presented. Finally, water contact angle measurements, surface energy evaluations, and a contact line dynamics assessment of evaporating drops on the coatings demonstrate that their enhanced wetting performance is attributed not only to their intrinsic hydrophilic nature but also to their porous microstructure, which promotes wicking and spreading at the nanometric scale.