The design, identification, and control of a novel, flexure-based, piezoelectric stack-actuated XY nanopositioning stage are presented in this paper. The main goal of the design is to combine the ability to scan over a relatively large range (25times25 mum) with high scanning speed. Consequently, the stage is designed to have its first dominant mode at 2.7 kHz. Cross-coupling between the two axes is kept to -35 dB, low enough to utilize single-input--single-output control strategies for tracking. Finite-element analysis (FEA) is used during the design process to analyze the mechanical resonance frequencies, travel range, and cross-coupling between the X- and Y-axes of the stage. Nonlinearities such as hysteresis are present in such stages. These effects, which exist due to the use of piezoelectric stacks for actuation, are minimized using charge actuation. The integral resonant control method is applied in conjunction with feedforward inversion technique to achieve high-speed and accurate scanning performances, up to 400 Hz.

In this paper, we propose a control design method for single-link flexible manipulators. The proposed technique is based on the integral resonant control (IRC) scheme. The controller consists of two nested feedback loops. The inner loop controls the joint angle and makes the system robust to joint friction. The outer loop, which is based on the IRC technique, damps the vibration and makes the system robust to the unmodeled dynamics (spill-over) and resonance frequency variations due to changes in the payload. The objectives of this work are: 1) to demonstrate the advantages of IRC, which is a high-performance controller design methodology for flexible structures with collocated actuator-sensor pairs and 2) to illustrate its capability of achieving precise end-point (tip) positioning with effective vibration suppression when applied to a typical flexible manipulator. The theoretical formulation of the proposed control scheme, a detailed stability analysis and experimental results obtained on a flexible manipulator are presented.

This paper demonstrates a simple second-order controller that eliminates scan-induced oscillation and provides integral tracking action. The controller can be retrofitted to any scanning probe microscope with position sensors by implementing a simple digital controller or operational amplifier circuit. The controller is demonstrated to improve the tracking bandwidth of an NT-MDT scanning probe microscope from 15 Hz (with an integral controller) to 490 Hz while simultaneously improving gain-margin from 2 to 7 dB. The penalty on sensor induced positioning noise is minimal. A unique benefit of the proposed control scheme is the performance and stability robustness with respect to variations in resonance frequency. This is demonstrated experimentally by a change in resonance frequency from 934 to 140 Hz. This change does not compromise stability or significantly degrade performance. For the scanning probe microscope considered in this paper, the noise is marginally increased from 0.30 to 0.39 nm rms. Open and closed-loop experimental images of a calibration standard are reported at speeds of 1, 10, and 31 lines per second (with a scanner resonance frequency of 290 Hz). Compared with traditional integral controllers, the proposed controller provides a bandwidth improvement of greater than 10 times. This allows faster imaging and less tracking lag at low speeds.

Piezoelectric stack-actuated parallel-kinematic nanopositioning platforms are widely used in nanopositioning applications. These platforms have a dominant first resonant mode at relatively low frequencies, typically in the hundreds of hertz. Furthermore, piezoelectric stacks used for actuation have inherent nonlinearities such as hysteresis and creep. These problems result in a typically low-grade positioning performance. Closed-loop control algorithms have shown the potential to eliminate these problems and achieve robust, repeatable nanopositioning. Using closed-loop noise profile as a performance criterion, three commonly used damping controllers, positive position feedback, polynomial-based pole placement, and resonant control are compared for their suitability in nanopositioning applications. The polynomial-based pole placement controller is chosen as the most suitable of the three. Consequently, the polynomial-based control design to damp the resonant mode of the platform is combined with an integrator to produce raster scans of large areas. A scanning resolution of approximately 8 nm, over a 100 mum times 100 mum area is achieved.

Inversion-based feedforward techniques have been known to deliver accurate tracking performance in the absence of plant parameter uncertainties. Piezoelectric stack actuated nanopositioning platforms are prone to variations in their system parameters such as resonance frequencies, due to changes in operating conditions like ambient temperature, humidity and loading. They also suffer from nonlinear effects of hysteresis, an inherent property of a piezoelectric actuator; charge actuation is applied to reduce the effects of hysteresis. In this work, we propose and test a technique that integrates a suitable feedback controller to reduce the effects of parameter uncertainties with the inversion-based feedforward technique. It is shown experimentally that the combination of damping, feedforward and charge actuation increases the tracking bandwidth of the platform from 310 to 1320 Hz.