In this paper, we survey the methods and concepts developed for the evaluation of dialogue systems. Evaluation, in and of itself, is a crucial part during the development process. Often, dialogue systems are evaluated by means of human evaluations and questionnaires. However, this tends to be very cost- and time-intensive. Thus, much work has been put into finding methods which allow a reduction in involvement of human labour. In this survey, we present the main concepts and methods. For this, we differentiate between the various classes of dialogue systems (task-oriented, conversational, and question-answering dialogue systems). We cover each class by introducing the main technologies developed for the dialogue systems and then present the evaluation methods regarding that class.