In this study, a subminiature implantable capacitive pressure sensor is proposed for biomedical applications. The proposed pressure sensor comprises an array of elastic silicon nitride (SiN) diaphragms formed by the application of a polysilicon (p-Si) sacrificial layer. In addition, using the p-Si layer, a resistive temperature sensor is also integrated into one device without additional fabrication steps or extra cost, thus enabling the device to measure pressure and temperature simultaneously. The sensor with a size of 0.5 × 1.2 mm was fabricated using microelectromechanical systems (MEMS) technology and was packaged in needle-shaped metal housing that is both insertable and biocompatible. The packaged pressure sensor immersed in a physiological saline solution exhibited excellent performance without leakage. The sensor achieved a sensitivity of approximately 1.73 pF/bar and a hysteresis of about 1.7%, respectively. Furthermore, it was confirmed that the pressure sensor operated normally for 48 h without experiencing insulation breakdown or degradation of the capacitance. The integrated resistive temperature sensor also worked properly. The response of the temperature sensor varied linearly with temperature variation. It had an acceptable temperature coefficient of resistance (TCR) of approximately 0.25%/°C.

As various healthcare technologies such as regenerative medicine, precision medicine, and alternative approaches to animal testing develop, the interest in the use and application of nano- and microfibers is steadily increasing. In this study, the effect of parylene-C coating on electrospun fibers was investigated, and a pattern coating method was developed to expand the potential utilization of parylene-C-coated electrospun fibers. An SEM analysis demonstrated that parylene-C was successfully deposited on the electrospun fibers without any failure such as pinholes or air bubbles. Biocompatibility was investigated through cell tests, which indicated that the coated fibers were non-toxic and supported cell growth well. Tensile tests demonstrated a significant increase in the elastic modulus of the parylene-C-coated fibers, with it nearly quadrupling compared to the original PCL fibers, and the fracture strength almost doubled. At the same time, hydrophobicity was well maintained without any statistically significant changes. In particular, a non-adhesive magnet–metal masking was proposed in order to selectively coat the electrospun fibers with parylene-C with a specific pattern. Furthermore, it was presented that the magnet–metal mask-based coating electrospun nanofibers with parylene-C could be used in the fabrication of hybrid fibers composed of different diameters and materials.