The results of experimental studies of the formation of narrow-band high-energy radiation in a discharge single-module KrF laser are presented. The conditions for the combustion of a diffuse discharge in a KrF laser are revealed, which provide a maximum specific energy of radiation pulses of 9.5 J/l, with an internal energy efficiency of ~4%. The duration of radiation generation for several half periods of the pump current is realized. The operating conditions of the optical system generator-amplifier allowing narrow-band (2 pm) high-energy radiation in the spectral range of 247.5–249.6 nm are determined.

A self-consistent two-dimensional model of the discharge KrF laser on Ne/Kr/F2 gas mixtures is described. The model predictions are compared with the experimental results for a KrF laser with an excitation pulse duration of ~ 30 ns. An agreement within 10% for the discharge current and laser energy is obtained. Evolution of the discharge width and of the radiation intensity distribution between the electrodes over the time of a radiation pulse is demonstrated. In addition, the effect of the electrode radii on laser energy is analyzed.

The kinetic processes accompanying plasma column formation in an inhomogeneous discharge in a Ne/Xe/HCl gas mixture at a pressure of 4 atm were investigated by using a two-dimensional model. Two cathode spots spaced by 0.7 cm were initiated by distorting the cathode surface at local points, which resulted in an increase in the field strength in the cathode region. Three regimes differing in the charging voltage, electric circuit inductance, and electric field strength at the local cathode points were considered. The spatiotemporal distributions of the discharge current; the electron density; and the densities of excited xenon atoms, HCl(v = 0) molecules in the ground state, and HCl(v > 0) molecules in vibrational levels were calculated. The development of the discharge with increasing the electron density from 10⁴ to 10¹⁶ cm⁻³ was analyzed, and three characteristic stages in the evolution of the current distribution were demonstrated. The width of the plasma column was found to depend on the energy deposited in the discharge. The width of the plasma column was found to decrease in inverse proportion to the deposited energy due to spatiotemporal variations in the rates of electron production and loss. The calculated dependences of the cross-sectional area of the plasma column on the energy deposited in the discharge agree with the experimental results.

We present two-dimensional simulation results of the formation and evolution of a diffuse plasma channel in the XeCl pumping discharge. Channel formation was initiated by metallic convexity at the cathode surface with a characteristic dimension of ∼0.1 cm. Two pumping regimes were considered. Initial voltage in the second regime was increased 1.6 times and impedance was decreased 2 times in contrast with the first regime. Evolutions and spatial distributions are presented for electron density, electric field, and frequencies of the main process. In the first regime, the diffuse plasma channel forms. The main processes causing development of the plasma channel are inhomogeneous distribution of the electric field, increase of the stepwise ionization frequency at n_e ∼ 10¹⁵ cm⁻³, and depletion of HCl. Increasing of the initial voltage and decreasing of the impedance in the second regime results in a quick rise of the discharge current and electron density in the discharge gap, and uniform discharge takes place during the current pulse.