A self-consistent two-dimensional model of the discharge KrF laser on Ne/Kr/F2 gas mixtures is described. The model predictions are compared with the experimental results for a KrF laser with an excitation pulse duration of ~ 30 ns. An agreement within 10% for the discharge current and laser energy is obtained. Evolution of the discharge width and of the radiation intensity distribution between the electrodes over the time of a radiation pulse is demonstrated. In addition, the effect of the electrode radii on laser energy is analyzed.

We present two-dimensional simulation results of the formation and evolution of a diffuse plasma channel in the XeCl pumping discharge. Channel formation was initiated by metallic convexity at the cathode surface with a characteristic dimension of ∼0.1 cm. Two pumping regimes were considered. Initial voltage in the second regime was increased 1.6 times and impedance was decreased 2 times in contrast with the first regime. Evolutions and spatial distributions are presented for electron density, electric field, and frequencies of the main process. In the first regime, the diffuse plasma channel forms. The main processes causing development of the plasma channel are inhomogeneous distribution of the electric field, increase of the stepwise ionization frequency at n_e ∼ 10¹⁵ cm⁻³, and depletion of HCl. Increasing of the initial voltage and decreasing of the impedance in the second regime results in a quick rise of the discharge current and electron density in the discharge gap, and uniform discharge takes place during the current pulse.

The simulation of the kinetic processes in the spatially homogeneous and heterogeneous plasma of the gas discharge in SF6 is performed. The calculated time dependences of the rates of the most important processes and the concentrations of electrons, ions, and other particles that affect the plasma characteristics are presented. The calculated and experimental results are compared. The kinetic processes are analyzed and their effect on the plasma characteristics is demonstrated. The calculated data regarding the development of the plasma channel are presented. An increase in the conductivity inside the channel is discussed.