This paper presents a scale factor calibration method based on virtual accelerations generated by electrostatic force. This method uses a series of voltage signals to simulate the inertial forces caused by the acceleration input, rather than frequent and laborious calibrations with high-precision instruments. The error transfer model of this method is systematically analyzed, and the geometrical parameters of this novel micromachined resonant accelerometer (MRA) are optimized. The experimental results demonstrate that, referring to the traditional earth’s gravitational field tumble calibration method, the error of the scale factor calibration is 0.46% within ±1 g by using our method. Moreover, the scale factor is compensated by virtual accelerations. After compensation, the maximum temperature drift of the scale factor decreases from 2.46 Hz/g to 1.02 Hz/g, with a temperature range from 40 °C to 80 °C.

This paper investigates the dynamic characteristics of the mode-localized resonant accelerometer (ML-RXL) both in small-signal and large-signal models. The analytical model of ML-RXL bandwidth at various amplitude ratio (AR) operating points (OPs) was derived and validated through simulations and experiments. For the small-signal model, the OP with larger AR results in a further broadening of the ML-RXL’s bandwidth. Specifically, when AR is from 1 to 4, the effective bandwidth is expanded from 46Hz to 152Hz. For large-signal model, this study reveals the emergence of multiple harmonic peaks in the AR output response curve, which become more pronounced as the intensity of the dynamic acceleration signal increases at a given OP. The findings indicate that the bandwidth of ML-RXL is constrained by mode frequency difference and dynamic acceleration signal intensity, and it can be expanded by adjusting the operating point. 2024-0209

This article proposes a force rebalance control scheme based on a mode-localized resonant accelerometer (ML-RXL), which is applied to address the limited measurement range problem of the ML-RXL. For the first time, an empirical response model of the weakly coupling resonators for the amplitude ratio output is established. Based on this, this paper builds an overall model of the force rebalance control system to analyze the sensitivity characteristics by simulations, which demonstrates that the scheme can effectively broaden the linear measurement range. It is demonstrated that the sensor exhibits a highly linear output within a measurement range of ±1 g, with a sensitivity of the feedback-control voltage output measured at 2.94 V/g. The measurement range is expanded by at least 6.7 times. Moreover, the results show that the minimum input-referred acceleration noise density of the sensor for the force rebalance control scheme is 3.29 μg/rtHz, and that the best bias instability is optimized to 5.34 μg with an integral time of 0.64 s.

This paper presents a comprehensive optimization of an outer frame anchor disk resonator gyroscope (DRG) with enhanced resistance to vibration and shock, achieved by increasing the resonant frequency of the tub and translation modes. Furthermore, the wineglass mode retains a high quality factor, enhancing sensitivity and reducing the angle random walk (ARW). The performance of the proposed DRG is analyzed using dynamic equations, and its structural parameters are optimized through finite element analysis (FEA). The prototype device was fabricated using a two-mask silicon-on-insulator (SOI) process on (100) single-crystal silicon (SCS), which is better suited for complementary metal-oxide–semiconductor (CMOS) integration compared to (111) SCS. Experimental results show an ARW of $0.63°/\sqrt{\mathrm{h}}$ and a bias instability (BI) of $7.7°/\mathrm{h}$, with no significant performance degradation observed under vibrational environments, indicating potential for tactical-grade performance.