This article proposes a force rebalance control scheme based on a mode-localized resonant accelerometer (ML-RXL), which is applied to address the limited measurement range problem of the ML-RXL. For the first time, an empirical response model of the weakly coupling resonators for the amplitude ratio output is established. Based on this, this paper builds an overall model of the force rebalance control system to analyze the sensitivity characteristics by simulations, which demonstrates that the scheme can effectively broaden the linear measurement range. It is demonstrated that the sensor exhibits a highly linear output within a measurement range of ±1 g, with a sensitivity of the feedback-control voltage output measured at 2.94 V/g. The measurement range is expanded by at least 6.7 times. Moreover, the results show that the minimum input-referred acceleration noise density of the sensor for the force rebalance control scheme is 3.29 μg/rtHz, and that the best bias instability is optimized to 5.34 μg with an integral time of 0.64 s.

This paper presents a comprehensive optimization of an outer frame anchor disk resonator gyroscope (DRG) with enhanced resistance to vibration and shock, achieved by increasing the resonant frequency of the tub and translation modes. Furthermore, the wineglass mode retains a high quality factor, enhancing sensitivity and reducing the angle random walk (ARW). The performance of the proposed DRG is analyzed using dynamic equations, and its structural parameters are optimized through finite element analysis (FEA). The prototype device was fabricated using a two-mask silicon-on-insulator (SOI) process on (100) single-crystal silicon (SCS), which is better suited for complementary metal-oxide–semiconductor (CMOS) integration compared to (111) SCS. Experimental results show an ARW of $0.63°/\sqrt{\mathrm{h}}$ and a bias instability (BI) of $7.7°/\mathrm{h}$, with no significant performance degradation observed under vibrational environments, indicating potential for tactical-grade performance.

This study presents a novel dual phase-locked loop two-dimensional synchronized motion modulation (TDSMM-DPLL) system designed to enhance the low-frequency detection capability of magnetoresistive (MR) sensors by effectively mitigating 1/f noise. The TDSMM-DPLL system integrates a comb-driven resonator and a piezoelectric cantilever beam resonator, achieving synchronized magnetic field modulation through a DPLL circuit that adjusts the resonant frequency of the comb-driven resonator to twice that of the cantilever beam resonator. Theoretical analysis and finite element simulations demonstrate a modulation efficiency of 38.98%, which is significantly higher than that of traditional one-dimensional modulation methods. Experimental validation confirms the system’s effectiveness, showing a 3.13-fold reduction in frequency Allan variance, decreasing from 217.32 ppb to 69.46 ppb, indicating substantial noise suppression. These results highlight the TDSMM-DPLL system’s potential to improve the performance of MR sensors in low-frequency applications, making it a promising solution for high-precision magnetic field detection.

This work presents a high-performance piezoelectric MEMS yaw gyroscope fabricated on a single-crystal silicon platform, which achieves a quality factor of 75 k—the highest reported to date among silicon-based piezoelectric gyroscopes. The device employs a wide annular resonator that operates at 132 kHz in the in-plane wineglass mode. To maximize transduction efficiency, we develop an analytical model that relates output charge to the area-integrated in-plane stress under modal deformation, and we use this model to guide parametric optimization of the annular width. The resulting geometry simultaneously enhances the mechanical quality factor and the piezoelectric coupling. A back-etching fabrication process is used to eliminate front-side release holes, thereby preserving structural continuity and suppressing thermoelastic damping. In open-loop rate mode operation with a native frequency split of 28 Hz, the gyroscope demonstrates an angle random walk of 0.34°/√h and a bias instability of 8.19°/h. These performance metrics are comparable to those of state-of-the-art lead zirconate titanate (PZT)-based annular gyroscopes, while the use of lead-free aluminum nitride as the transduction material ensures compliance with RoHS environmental regulations.

Resonant mass sensors based on micro/nanoelectromechanical systems (MEMS/NEMS) offer a promising approach for label-free gravimetric detection. However, practical applications often require not only high sensitivity but also improved loading repeatability and reduced dependence on mass loading position. In this work, a suspended resonant mass sensor based on a 10 nm-thick Hf_0.5Zr_0.5O₂ (HZO) piezoelectric film is proposed. A central silicon loading platform is introduced to provide a mechanically robust and spatially uniform sensing region. A Kirchhoff plate model incorporating residual stress is established to analyze the effects of residual stress and platform geometry on the resonant characteristics. The device is fabricated by combining SOI micromachining with wet transfer of the ultrathin HZO film. Laser Doppler vibrometry measurements show a first-order resonant frequency of 1.303 MHz and a quality factor of 342, corresponding to an extracted residual stress of approximately 1.319 GPa. Finite element simulations calibrated by experimental parameters indicate a uniform first-mode displacement distribution and a linear frequency response to added mass from 0 to 1 ng. The obtained mass sensitivities are 150.7 Hz/pg and 166.8 Hz/pg from finite element and analytical models, respectively. The proposed structure provides a feasible route toward repeatable pg-level resonant mass sensing based on ultrathin piezoelectric films.