During the thermal aging process of epoxy resin, microcracks, interfacial delamination, and warpage are the key factors leading to semiconductor device damage. Here, epoxy-resin specimens (EP-Ss) and epoxy-resin/silicon-wafer composites (EP-SWs) were prepared to analyze the distribution of residual stress (RS) in epoxy resin and its thermal aging process changes. The uniaxial tensile approach and Raman spectroscopy (RAS) showed that the peak shift of aliphatic C-O in EP-Ss was negatively correlated with the external stress, and that the stress correlation coefficient was −2.76 × 10−2 cm−1/MPa. Then, RAS was used to evaluate the RS distribution of EP-SWs, obtaining a high-resolution stress-distribution image of 50 × 50 pixels and revealing a strong stress concentration at the interface between the epoxy resin and the silicon wafer. Additionally, Fourier transform infrared spectroscopy (FTIR), Differential scanning calorimetry (DSC), Field-emission scanning electron microscopy (FE-SEM), and RAS were used to analyze the chemical composition, molecular structure, interfacial microstructure, and RS of the epoxy resin during the thermal aging process. With the increase in the thermal aging time, the epoxy resin underwent secondary curing, the RS at the interface changed from tensile stress to compressive stress, and cracks were formed. The results illuminate the effect of the thermal aging process on the interface-failure mechanism of composite materials, aiding in the reliability evaluation and safety design of semiconductor devices.
It is difficult to simultaneously achieve surface-enhanced Raman scattering (SERS) and surface-enhanced fluorescence (SEF) for noble metals. Herein, a composite substrate is demonstrated based on the rational construction of Ag nanoparticles (Ag NPs) and inverse opal polydimethylsiloxane (PDMS) for surface Raman fluorescence dual enhancement. The well-designed Ag nanoparticle (Ag NP)-decorated inverse opal PDMS (AIOP) composite substrate is fabricated using the polystyrene (PS) photonic crystal method and the sensitization reduction technique. The inverse opal PDMS enhances the electromagnetic (EM) field by increasing the loading of Ag NPs and plasmonic coupling of Ag NPs, leading to SERS activity. The thin shell layer of polyvinyl pyrrolidone (PVP) in core–shell Ag NPs isolates the detected molecule from the Ag core to prevent the fluorescence resonance energy transfer and charge transfer to eliminate fluorescence quenching and enable SEF performance. Based on the blockage of the core–shell structure and the enhanced EM field originating from the inverse opal structure, the as-fabricated AIOP composite substrate shows dual enhancement in surface Raman fluorescence. The AIOP composite substrate in this work, which combines improved SERS activity and SEF performance, not only promotes the development of surface-enhanced spectroscopy but also shows promise for applications in flexible sensors.