Magnesium fluoride (MgF₂) materials are commonly used for near/medium infrared anti-reflection optical coatings due to their low refractive index and wide-range transparency. Ion assistant deposition is an important technique to increase the density of MgF₂ and reduce absorption around 2.94 µm caused by high porosity and moisture adsorption. However, the excessive energy of Argon ion will induce a color center and; therefore, lead to UV/Visible absorption. In this paper, oxygen ion was introduced to reduce the color center effect in MgF₂ thin film deposited using electron beam evaporation with ion assistant. The films were deposited on Bk7 and single crystal silicon substrates under various oxygen ion beam currents. The microstructure, optical constant, film density, stress, and adhesion are investigated, including the absorption properties at the infrared hydroxyl (–OH) vibration peak. The results show that as the oxygen ion beam current increases, the absorption value at the position of the infrared OH vibration, defects, and stress of the film decrease, while the refractive index increases. However, MgF₂ has poor adhesion using oxygen ion-assisted deposition. Thin MgF₂ film without ion beam assistant was used as adhesive layer, high density, and low absorption MgF₂ film with good adhesion was obtained.

A novel merit function was constructed using the spectral coefficient average error and standard deviation, which can simultaneously optimize the expectation of spectral coefficient error and the envelope of standard deviation. Thus, a multi-objective optimization strategy based on Non-Dominated Sorting Genetic Algorithm and Sequential quadratic programming was proposed. By comparing result of wideband anti-reflection film, cut-off filter and Infrared dual-band filter designed by the conventional algorithm and the new algorithm, the control effect of the new algorithm on sensitivity of film parameters error was verified. The results show that the novel design method has the characteristics of time-efficient calculations and is capable of effectively improving the production yield of the film system, which has practical significance.