Low-Energy High-Current Electron Beam (LEHCEB) is an innovative vacuum technology employed for the surface modification of conductive materials. Surface treatments by means of LEHCEB allow the melting and rapid solidification of a thin layer (up to ~10 μm) of material. The short duration of each pulse (2.5 μs) allows for the generation of high thermal rates, up to 10⁹ K/s. Due to the peculiar features of LEHCEB source, in situ temperature monitoring inside the vacuum chamber is unfeasible, even with the most rapid IR pyrometers available on the market. Therefore, multiphysics simulations serve as a tool for predicting and assessing the thermal effects induced by electron beam irradiation. COMSOL Multiphysics was employed to study the thermal behaviour of metals and alloys at the sub-microsecond time scale by implementing both experimental power time profiles and semi-empirical electron penetration functions. Three case studies were considered: (a) 17-4 PH steel produced by Binder Jetting, (b) biphasic Al-Si13 alloy, and (c) Magnetron Sputtering Nb films on Ti substrate. The influence on the thermal effects of electron accelerating voltage and number of pulses was investigated, as well as the role of the physicochemical properties of the materials.