Recently, thin-film lithium niobate electro-optical modulators have developed rapidly and have become the core solution for the next generation of electro-optical problems. Compared with bulk lithium niobate modulators, these modulators not only retain the advantages of lithium niobate materials, such as low loss, high extinction ratio, high linear response and high optical power handling capabilities, but can also effectively improve some performance parameters, such as the voltage bandwidth performance of the modulator. Unfortunately, the extremely small electrode gap of thin-film lithium niobate EO (electro-optic) modulators causes metal absorption, resulting in higher microwave losses. The electro-optical performance of the modulator, thus, deteriorates at high frequencies. We designed traveling-wave electrodes with microstructures to overcome this limitation and achieve a 3 dB electro-optical bandwidth of 51.2 GHz. At the same time, we maintain low on-chip losses of <2 dB and a high extinction ratio of 15 dB. It is important to note that the devices we manufactured were metal-encapsulated and passed a series of reliability tests. The success of this modulator module marks a key step in the commercialization and application of thin-film lithium niobate modulation devices.

With the rapid development of information technology, the global data volume has been continuously expanding, placing unprecedented demands on communication networks to accommodate precipitously increasing throughput. Thin-film lithium niobate (TFLN) modulators, characterized by their large theoretical bandwidth, low half-wave voltage, and suitability for high-density integration, show great application potential in high-speed optical modules and optical interconnection networks. However, the persistent issue of velocity mismatch between radio frequency (RF) signals and optical carriers invariably hinders the utilization of higher-frequency bands, which restricts the modulation speed of the fabricated devices. In this paper, an electrode co-loaded with square serrations and T-shaped stubs was utilized to achieve precise velocity matching and excellent impedance matching. Leveraging this approach, a TFLN modulator chip with an electro-optic bandwidth far exceeding 67 GHz and a return loss of greater than 12 dB was successfully fabricated on a silicon substrate. The velocity of RF signals can be tuned by altering the lengths of the slow-wave structures, which provides guidance for the design and optimization of broadband modulators.