We introduce an Atomic Layer Deposition (ALD) technique referred to here as Sequential, No-Atmosphere Processing (SNAP) to fabricate ferroelectric Hf0.5Zr0.5O2 capacitors in Metal–Ferroelectric–Metal (MFM) structures. SNAP involves the ALD of each layer sequentially while maintaining the sample under vacuum process conditions without ambient exposure during the entire sequential deposition processes. We first use plasma enhanced ALD to fabricate 002-textured TiN films and study the degree of texture and quality of the film by X-ray Diffraction (XRD), Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS), and transmission electron microscopy. Building upon the textured TiN film, we fabricate MFM capacitors with 10-nm-thick Hf0.5Zr0.5O2 via SNAP deposition and observe an unexpectedly large remanent polarization (2Pr = 54.2 μC/cm2). We report that annealing at T <800 °C and at T = 800 °C results in different ferroelectric behaviors and phases determined by grazing incidence XRD patterns. We infer that the nonpolar tetragonal phase is dominant in films treated at T <800 °C, whereas the polar orthorhombic phase is dominant in films treated at T = 800 °C. Using ToF-SIMS and x-ray spectroscopy depth profiling on MFM capacitors, we observe an increase in the concentration of defects in the Hf0.5Zr0.5O2 layer after annealing. We believe that the absence of the native passive layer between Hf0.5Zr0.5O2 and TiN layers made via SNAP deposition is responsible for the unexpectedly large remanent polarization. In addition, we associate the 002-textured TiN as potentially playing a role in realizing the unexpectedly large remanent polarization.
Ferroelectric (Hf,Zr)O2 thin films have attracted increased interest from the ferroelectrics community and the semiconductor industry due to their ability to exhibit ferroelectricity at nanoscale dimensions. The properties and performance of the ferroelectric (Hf,Zr)O2 films generally depend on various factors such as surface energy (e.g., through grain size or thickness), defects (e.g., through dopants, oxygen vacancies, or impurities), electrodes, interface quality, and preferred crystallographic orientation (also known as crystallographic texture or simply texture) of grains and/or domains. Although some factors affecting properties and performance have been studied extensively, the effects of texture on the material properties are still not understood. Here, the influence of texture of the bottom electrode and Hf0.5Zr0.5O2 (HZO) films on properties and performance is reported. The uniqueness of this work is the use of a consistent deposition process known as Sequential, No-Atmosphere Processing (SNAP) that produces films with different preferred orientations yet minimal other differences. The results shown in this study provide both new insight on the importance of the bottom electrode texture and new fundamental processing-structure–property relationships for the HZO films.
Ensuring sustainable food systems is an urgent global priority as populations grow and environmental pressures mount. Technological innovations such as genetic engineering (GE) and nanotechnology (nano) have been promoted as promising pathways for achieving greater sustainability in agriculture and food production. Yet, the sustainability of these technologies is not defined by technical performance alone; it hinges on how they are perceived by key stakeholders and how well they align with broader societal values. This study addresses the critical question of how expert stakeholders evaluate the sustainability of GE and nano-based food and agriculture (agrifood) products. Using a multi-method online platform, we engaged 42 experts across academia, government, industry, and NGOs in the United States to assess six real-world case studies—three using GE and three using nano—across ten different dimensions of sustainability. We show that nano-based products were consistently rated more favorably than their GE counterparts in terms of environmental, economic, and social sustainability, as well as across ethical and societal dimensions. Like prior studies, our results reveal that stakeholders see meaningful distinctions between nanotechnology and biotechnology, likely due to underlying value-based concerns about animal welfare, perceived naturalness, or corporate control of agrifood systems. The fruit coating and flu vaccine—both nano-enabled—received the most positive ratings, while GE mustard greens and salmon were the most polarizing. These results underscore the importance of incorporating stakeholder perspectives in technology assessment and innovation governance. These results also suggest that responsible innovation efforts in agrifood systems should prioritize communication, addressing meaningful societal needs, and the contextual understanding of societal values to build trust and legitimacy.
Extreme weather-related events are showing how infrastructure disruptions in hinterlands can affect cities. This paper explores the risks to city infrastructure services including transportation, electricity, communication, fuel supply, water distribution, stormwater drainage, and food supply from hinterland hazards of fire, precipitation, post-fire debris flow, smoke, and flooding. There is a large and growing body of research that describes the vulnerabilities of infrastructures to climate hazards, yet this work has not systematically acknowledged the relationships and cross-governance challenges of protecting cities from remote disruptions. An evidence base is developed through a structured literature review that identifies city infrastructure vulnerabilities to hinterland hazards. Findings highlight diverse pathways from the initial hazard to the final impact on an infrastructure, demonstrating that impacts to hinterland infrastructure assets from hazards can cascade to city infrastructure. Beyond the value of describing the impact of hinterland hazards on urban infrastructure, the identified pathways can assist in informing cross-governance mitigation strategies. It may be the case that to protect cities, local governments invest in mitigating hazards in their hinterlands and supply chains.