The impact of modulation periods on the microstructure, as well as the tribological and mechanical characteristics of the AlCrTiVNbN/TiSiN nano multilayer films, was investigated. The films were prepared with modulation periods ranging from 4 nm to 7 nm, and their properties were explored using X-ray diffraction (XRD), scanning electron microscope (SEM), nanoindentation, and a tribological tester. All nano multilayer films revealed a face-centered cubic (FCC) structure with a preferred planar direction of (200). As the modulation period increased, the XRD peak moved to higher angles, and the interplanar distance decreased. Also, the mechanical properties deteriorated, and the COF rose monotonically as a result. The nano multilayer film with a modulation period equal to 4 nm exhibited a smooth surface with minimal small particles, the highest hardness of 15.51 ± 0.16 GPa and elastic modulus of 182.89 ± 2.38 GPa, the highest values for the ratios of H/E and H³/E², the lowest average friction coefficient of 0.73, and a wear rate equal to (8.2 9 ± 0.18) × 10⁻⁸ mm³·N⁻¹·m⁻¹. The improvement in the properties of the film was ascribed to the coherent growth and alternating stress field between the AlCrTiVNbN and TiSiN layers.

FeCoCrNiNb_xN (x = 0, 0.25, 0.5, 0.75, 1 molar) high-entropy nitride (HEN) films were fabricated on 304 stainless steel and Si wafers using magnetron sputtering to investigate the influence of Nb content on the microstructure, mechanical properties, and tribological performance. X-ray diffraction (XRD) analysis reveals a face-centered cubic (FCC) structure with a preferred orientation in the (200) plane, which transfers to the (111) plane as the Nb content increases. The lattice distortion induced by Nb incorporation enhanced crystallinity, with the Nb_0.5N film exhibiting the highest diffraction peak intensity and interplanar distance. Cross-sectional SEM images displayed columnar crystal structures, while the surface morphology evolved from “cauliflower-like” to smoother clusters with increasing Nb content, reducing average roughness from 7.54 nm (Nb₀) to 4.89 nm (Nb₁). The hardness and elastic modulus initially decrease, then peak at 25.56 GPa and 265.36 GPa, respectively, for the Nb₁ film, attributed to solid solution strengthening and high-entropy effects. Tribological tests demonstrated that Nb₁ achieved the lowest coefficient of friction (0.46), wear volume (1.23 × 10⁻³ mm³), and wear rate (5.11 × 10⁻⁸ mm³·N⁻¹·m⁻¹), owing to NbN phase formation, refined grains, and reduced surface roughness. The wear mechanisms are abrasive and oxidative wear.