This paper proposes a novel micro-electromechanical system (MEMS) piezoresistive pressure sensor with a four-petal membrane combined with narrow beams and a center boss (PMNBCB) for low-pressure measurements. The stresses induced in the piezoresistors and deflection of the membrane were calculated using the finite element method (FEM). The functions of the relationship between the dimension variables and mechanical performance were determined based on the curve fitting method, which can provide an approach for geometry optimization of the sensor. In addition, the values in the equations were varied to determine the optimal dimensions for the proposed membrane. Then, to further improve the sensitivity of the sensor, a series of rectangular grooves was created at the position of the piezoresistors. The proposed diaphragm was compared to existing diaphragms, and a considerable increase in the sensitivity and a considerable decrease in nonlinearity error could be achieved by using the proposed sensor. The simulation results suggest that the sensor with the PMNBCB structure obtained a high sensitivity of 34.67 mV/kPa and a low nonlinearity error of 0.23% full-scale span (FSS) for the pressure range of 0–5 kPa. The proposed sensor structure is a suitable selection for MEMS piezoresistive pressure sensors.

Microengineering/nanoengineering is an emerging field that enables engineering and scientific discoveries in the microworld. As an effective and powerful tool for automation and manipulation at small scales, precision motion measurement by computer microvision is now broadly accepted and widely used in microengineering/nanoengineering. Unlike other measurement methods, the vision-based techniques can intuitively visualize the measuring process with high interactivity, expansibility, and flexibility. This article aims to comprehensively present a survey of microvision-based motion measurement from the collective experience. Working principles of microvision systems are first introduced and described, where the hardware configuration, model calibration, and motion measurement algorithms are systematically summarized. The characteristics and performances of different microvision-based methods are then analyzed and discussed in terms of measurement resolution, range, degree of freedom, efficiency, and error sources. Recent advances of applications empowered by the developed computer microvision-based methods are also presented. The review can be helpful to researchers who engage in the development of microvision-based techniques and provide the recent state and tendency for the research community of vision-based measurement, manipulation, and automation at microscale/nanoscale.

The nonlinear analysis and design of contact-aided compliant mechanisms (CCMs) are challenging. This paper presents a nonlinear method for analyzing the deformation of general beams that contact rigid surfaces in CCMs. The large deflection of the general beam is modeled by using the chained pseudo-rigid-body model. A geometry constraint from the contact surface is developed to constrain the beam’s deformed configuration. The contact analysis problem is formulated based on the principle of minimum potential energy and solved using an optimization algorithm. Besides, a novel technique based on the principle of work and energy is proposed to calculate the reaction force/moment of displacement-loaded cases. Several analysis examples of the compliant mechanisms with straight or curved beams are used to verify the proposed method. The results show that the proposed method and technique can evaluate the deformation of beam-based CCMs and the reaction force/moment with acceptable accuracy, respectively.

The moving morphable component (MMC)-based method is a newly developed approach for topology optimization. In the MMC-based method, the design problem is formulated using a set of morphable components, and the optimized structural topologies are obtained by optimizing shapes, sizes, and locations of these components. However, the optimization process often tends to break the connection between the load area and the supported boundary. This disconnection has a strong influence on the convergence, especially when the large deformation effects are considered. In this paper, a method is developed for topology optimization of geometrically nonlinear structures by using the MMC-based method. A scheme is developed to address the disconnection issue in the optimization process. Several numerical examples are used to demonstrate the validity of the proposed method.