β-Ga₂O₃, with excellent bandgap, breakdown field, and thermal stability properties, is considered to be one of the most promising candidates for power devices including field-effect transistors (FETs) and for other applications such as Schottky barrier diodes (SBDs) and solar-blind ultraviolet photodetectors. Ohmic contact is one of the key steps in the β-Ga₂O₃ device fabrication process for power applications. Ohmic contact techniques have been developed in recent years, and they are summarized in this review. First, the basic theory of metal–semiconductor contact is introduced. After that, the representative literature related to Ohmic contact with β-Ga₂O₃ is summarized and analyzed, including the electrical properties, interface microstructure, Ohmic contact formation mechanism, and contact reliability. In addition, the promising alternative schemes, including novel annealing techniques and Au-free contact materials, which are compatible with the CMOS process, are discussed. This review will help our theoretical understanding of Ohmic contact in β-Ga₂O₃ devices as well as the development trends of Ohmic contact schemes.

Ultra-bandgap semiconductor material, β-gallium oxide (β-Ga₂O₃), has great potential for fabricating the next generation of high-temperature, high-voltage power devices due to its superior material properties and cost competitiveness. In addition, β-Ga₂O₃ has the advantages of high-quality, large-size, low-cost, and controllable doping, which can be realized by the melt method. It has a wide bandgap of 4.7–4.9 eV, a large breakdown field strength of 8 MV/cm, and a Baliga figure of merit (BFOM) as high as 3000, which is approximately 10 and 4 times that of SiC and GaN, respectively. These properties enable β-Ga₂O₃ to be strongly competitive in power diodes and metal-oxide-semiconductor field-effect transistor (MOSFET) applications. Most of the current research is focused on electrical characteristics of those devices, including breakdown voltage (V_BR), specific on-resistance (R_ON,SP), power figure of merit (PFOM), etc. Considering the rapid development of β-Ga₂O₃ diode technology, this review mainly introduces the research progress of different structures of β-Ga₂O₃ power diodes, including vertical and lateral structures with various advanced techniques. A detailed analysis of Ga₂O₃-based high-voltage power diodes is presented. This review will help our theoretical understanding of β-Ga₂O₃ power diodes as well as the development trends of β-Ga₂O₃ power application schemes.