This study develops a MEMS-based low-cost sensing platform for sensing gas flow rate and flow direction comprising four silicon nitride cantilever beams arranged in a cross-form configuration, a circular hot-wire flow meter suspended on a silicon nitride membrane, and an integrated resistive temperature detector (RTD). In the proposed device, the flow rate is inversely derived from the change in the resistance signal of the flow meter when exposed to the sensed air stream. To compensate for the effects of the ambient temperature on the accuracy of the flow rate measurements, the output signal from the flow meter is compensated using the resistance signal generated by the RTD. As air travels over the surface of the cross-form cantilever structure, the upstream cantilevers are deflected in the downward direction, while the downstream cantilevers are deflected in the upward direction. The deflection of the cantilever beams causes a corresponding change in the resistive signals of the piezoresistors patterned on their upper surfaces. The amount by which each beam deflects depends on both the flow rate and the orientation of the beam relative to the direction of the gas flow. Thus, following an appropriate compensation by the temperature-corrected flow rate, the gas flow direction can be determined through a suitable manipulation of the output signals of the four piezoresistors. The experimental results have confirmed that the resulting variation in the output signals of the integrated sensors can be used to determine not only the ambient temperature and the velocity of the air flow, but also its direction relative to the sensor with an accuracy of ± 7.5^o error.

This study proposes a wireless remote weather monitoring system based on Micro-Electro-Mechanical Systems (MEMS) and wireless sensor network (WSN) technologies comprising sensors for the measurement of temperature, humidity, pressure, wind speed and direction, integrated on a single chip. The sensing signals are transmitted between the Octopus II-A sensor nodes using WSN technology, following amplification and analog/digital conversion (ADC). Experimental results show that the resistance of the micro temperature sensor increases linearly with input temperature, with an average TCR (temperature coefficient of resistance) value of 8.2 × 10⁻⁴ (°C⁻¹). The resistance of the pressure sensor also increases linearly with air pressure, with an average sensitivity value of 3.5 × 10⁻² (Ω/kPa). The sensitivity to humidity increases with ambient temperature due to the effect of temperature on the dielectric constant, which was determined to be 16.9, 21.4, 27.0, and 38.2 (pF/%RH) at 27 °C, 30 °C, 40 °C, and 50 °C, respectively. The velocity of airflow is obtained by summing the variations in resistor response as airflow passed over the sensors providing sensitivity of 4.2 × 10⁻², 9.2 × 10⁻², 9.7 × 10⁻² (Ω/ms⁻¹) with power consumption by the heating resistor of 0.2, 0.3, and 0.5 W, respectively. The passage of air across the surface of the flow sensors prompts variations in temperature among each of the sensing resistors. Evaluating these variations in resistance caused by the temperature change enables the measurement of wind direction.

A BIPV-powered smart window comprising a building-integrated photovoltaic (BIPV) panel and an all-solid-state electrochromic (EC) stack is proposed. In the proposed device, the output voltage of the BIPV panel varies in accordance with the intensity of the incident light and is modulated in such a way as to generate the EC stack voltage required to maintain the indoor illuminance within a specified range. Two different EC stacks are fabricated and characterized, namely one stack comprising ITO/WO₃/Ta₂O₅/ITO and one stack comprising ITO/WO₃/lithium-polymer electrolyte/ITO. It is shown that of the two stacks, the ITO/WO₃/lithium-polymer electrolyte/ITO stack has a larger absorptance (i.e., approximately 99% at a driving voltage of 3.5 V). The experimental results show that the smart window incorporating an ITO/WO₃/lithium-polymer electrolyte/ITO stack with an electrolyte thickness of 1.0 μm provides an indoor illuminance range of 750–1,500 Lux under typical summertime conditions in Taiwan.

The goal of this study is to develop an airflow meter sensor for the detection of vehicle intake system in internal combustion engines. The study uses micro-electromechanical process technology to develop a hot-film flow meter with an alumina substrate and platinum film heater; the hot-line method is used to create a micro-airflow anemometry meter sensor relying on variations in resistance of the platinum film corresponding to different wind velocities at the set temperatures. The alumina plate used in this study is produced by polishing an alumina substrate; a platinum film is then deposited on the plate to complete the micro-heater used in the sensor. Resistance on the sensor side varies as gas flows through the sensor, and the instrument determines airflow velocity on the basis of the changes in resistance caused by gas flow differences. Airflow velocities ranging from 10 to 60 m/s are used to test. Signals of change in resistance display a regular slope, indicating that the relationship between the changes in airflow velocity remains predictable throughout the sensing range. Therefore, the sensor can achieve its purpose of airflow measurement completely.