In the framework of high temperature components, the need to evaluate the accumulated creep damage during service life is fundamental to extend the life of components which are currently deemed as scrap as per design intent. Thus, the life assessment of Ni-based superalloys could be performed in relation to the accumulated creep deformation which represents the limiting factor for serviced components. Despite the different microstructural changes that occur in service life, this work focuses on the possibility to evaluate the material strain by means of electron backscattered diffraction (EBSD). The key point is the identification of the correlation between geometrically necessary dislocation (GND) density derived from EBSD analyses and the reached creep strain for a single crystal Ni-based superalloy. However, the results of GND density are affected by the settings’ parameters adopted to perform the analysis by the magnification level and the step size. These two parameters have been optimized by analyzing specimens from interrupted creep tests at strain levels between 0.5% and 10%, in the temperature range between 850 °C and 1000 °C.