Robots with submillimeter dimensions are of interest for applications that range from tools for minimally invasive surgical procedures in clinical medicine to vehicles for manipulating cells/tissues in biology research. The limited classes of structures and materials that can be used in such robots, however, create challenges in achieving desired performance parameters and modes of operation. Here, we introduce approaches in manufacturing and actuation that address these constraints to enable untethered, terrestrial robots with complex, three-dimensional (3D) geometries and heterogeneous material construction. The manufacturing procedure exploits controlled mechanical buckling to create 3D multimaterial structures in layouts that range from arrays of filaments and origami constructs to biomimetic configurations and others. A balance of forces associated with a one-way shape memory alloy and the elastic resilience of an encapsulating shell provides the basis for reversible deformations of these structures. Modes of locomotion and manipulation span from bending, twisting, and expansion upon global heating to linear/curvilinear crawling, walking, turning, and jumping upon laser-induced local thermal actuation. Photonic structures such as retroreflectors and colorimetric sensing materials support simple forms of wireless monitoring and localization. These collective advances in materials, manufacturing, actuation, and sensing add to a growing body of capabilities in this emerging field of technology.
13 December 2018 in IEEE Transactions on Industrial Electronics
This paper presents a novel actuator-internal two degree-of-freedom (2-DOF) micro/nano positioning stage actuated by piezoelectric (PZT) actuators, which can be used as a fine actuation part in dual-stage system. To compensate the positioning error of coarse stage and achieve a large motion stroke, a symmetrical structure with an arch-shape bridge-type amplifier based on single notch circular flexure hinges is proposed and utilized in the positioning stage. Due to the compound bridge arm configuration and compact flexure hinge structure, the amplification mechanism can realize high lateral stiffness and compact structure simultaneously, which is of great importance to protect PZT actuators. The amplification mechanism is integrated into the decoupling mechanism to improve compactness, and to produce decoupled motion in X- and Y-axes. An analytical model is established to explore the static and dynamic characteristics, and the geometric parameters are optimized. The performance of the positioning stage is evaluated through finite element analysis and experimental test. The results indicate that the stage can implement 2-DOF decoupled motion with a travel range of 55.4 × 53.2 μm 2 , and the motion resolution is 8 nm. The stage can be used in probe tip-based micro/nano scratching.
22 August 2019 in IEEE Transactions on Industrial Electronics
To realize high precision rotation angle adjustment in micro/nano manipulation, a novel monolithic 2- degree of freedom (DOF) pure rotation platform is designed, fabricated and tested in this paper. The rotation platform is driven by two piezoelectric (PZT) actuators. Rotation decoupling is realized based on three Hooke's joints and a large rotation range is obtained based on two bridge-type mechanisms. Compared with other rotation platforms, the developed 2-DOF pure rotation platform has the advantages of fewer actuators due to rotation decoupling design and larger working frequency range due to compact structure and monolithic fabrication. An analytical model is established to calculate transmission ratio and input stiffness. The dominant parameters are determined based on sensitivity analysis. Finite element analysis (FEA) is conducted to investigate the characteristics of the rotation platform. Experimental tests are carried out to investigate the performance of the rotation platform. Decoupling test results show the maximum rotation angles in X- and Y- axes are 2.04 mrad and 2.12 mrad, respectively, and the X- and Y- axes relative coupling errors are 2.03% and 2.09%, respectively. Closed loop control results show that the settling time is 40 ms and the resolutions in X- and Y- axes are both 5 μrad.
A novel monolithic piezoelectric actuated wire clamp is presented in this paper to achieve fast, accurate, and robust microelectronic device packaging. The wire clamp has compact, flexure-based mechanical structure and light weight. To obtain large and robust jaw displacements and ensure parallel jaw grasping, a two-stage amplification composed of a homothetic bridge type mechanism and a parallelogram leverage mechanism was designed. Pseudo-rigid-body model and Lagrange approaches were employed to conduct the kinematic, static, and dynamic modeling of the wire clamp and optimization design was carried out. The displacement amplification ratio, maximum allowable stress, and natural frequency were calculated. Finite element analysis (FEA) was conducted to evaluate the characteristics of the wire clamp and wire electro discharge machining technique was utilized to fabricate the monolithic structure. Experimental tests were carried out to investigate the performance and the experimental results match well with the theoretical calculation and FEA. The amplification ratio of the clamp is 20.96 and the working mode frequency is 895 Hz. Step response test shows that the wire clamp has fast response and high accuracy and the motion resolution is 0.2 μm. High speed precision grasping operations of gold and copper wires were realized using the wire clamper.
1 June 2020 in International Journal of Solids and Structures