Miniaturization precision positioning platforms are needed for in situ nanomechanical test applications. This paper proposes a compact precision positioning platform integrating strain gauges and the piezoactuator. Effects of geometric parameters of two parallel plates on Von Mises stress distribution as well as static and dynamic characteristics of the platform were studied by the finite element method. Results of the calibration experiment indicate that the strain gauge sensor has good linearity and its sensitivity is about 0.0468 mV/μm. A closed-loop control system was established to solve the problem of nonlinearity of the platform. Experimental results demonstrate that for the displacement control process, both the displacement increasing portion and the decreasing portion have good linearity, verifying that the control system is available. The developed platform has a compact structure but can realize displacement measurement with the embedded strain gauges, which is useful for the closed-loop control and structure miniaturization of piezo devices. It has potential applications in nanoindentation and nanoscratch tests, especially in the field of in situ nanomechanical testing which requires compact structures.

Aiming at the mechanical testing of three-dimensional specimens with feature size of centimeter level, a miniaturized tensile platform, which presents compatibility with scanning electron microscope (SEM) and metallographic microscope, was designed and built. The platform could accurately evaluate the parameters such as elastic modulus, elongation and yield limit, etc. The calibration experiments of load sensor and displacement sensor showed the two kinds of sensors had high linearity. Testing of transmission error and modal parameters showed that the platform presented good following behaviors and separation of resonance region. Comparison tests based on stress-strain curve were carried out between the self-made platform and the commercial tensile instrument (Instron) to verify the feasibility of the platform. Furthermore, the in situ tensile experiment under metallographic microscope was carried out on a kind of manganese steel.