Markus Kircher

Mr. Markus Kircher

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Research Focus & Metrics

Academic Career Length

1Year (2026-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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17 February 2026 in Nanomaterials
Verified
Journal Article
Open access
PDF file
JAJonas Amann
Jonas Amann
MKMarkus Kircher
Markus Kircher
AOAndreas Otto
Andreas Otto
BHBalint Istvan Hajas
Balint Istvan Hajas
AKAlexander Kirnbauer
Alexander Kirnbauer
RFRoland Fürbacher
Roland Fürbacher
Ultrafast laser processing is constrained by an inherent throughput–resolution trade-off, typically addressed either by high-speed single-beam scanning or by parallel processing approaches. Here, a scanning-based dynamic mask projection concept is presented, combining both strategies by integrating a digital micromirror device (DMD) for dynamic binary amplitude mask generation with galvanometric scanning for high-speed lateral repositioning of the projected pattern. A high-numerical-aperture microscope objective is used to project the mask for thin film laser ablation with sub-micrometer feature sizes, while scanning extends the processing area beyond a single projected pattern, ultimately limited by the objective’s field of view. The concept is demonstrated by selective single-pulse pattern ablation of 10 nm thick tantalum nitride (TaN) thin films on glass substrates using 230 fs pulses at a center wavelength of 515 nm. The optical system enables a 770 nm minimum feature size across a scan field with an area-equivalent circular diameter of 550 µm. Dynamic mask projection combined with fast scanning offers a scalable route to high-throughput laser nanoprocessing and is relevant to fabrication and processing of nanomaterials, digital mask lithography, and micro- and nanomachining.