Ultrafast laser processing is constrained by an inherent throughput–resolution trade-off, typically addressed either by high-speed single-beam scanning or by parallel processing approaches. Here, a scanning-based dynamic mask projection concept is presented, combining both strategies by integrating a digital micromirror device (DMD) for dynamic binary amplitude mask generation with galvanometric scanning for high-speed lateral repositioning of the projected pattern. A high-numerical-aperture microscope objective is used to project the mask for thin film laser ablation with sub-micrometer feature sizes, while scanning extends the processing area beyond a single projected pattern, ultimately limited by the objective’s field of view. The concept is demonstrated by selective single-pulse pattern ablation of 10 nm thick tantalum nitride (TaN) thin films on glass substrates using 230 fs pulses at a center wavelength of 515 nm. The optical system enables a 770 nm minimum feature size across a scan field with an area-equivalent circular diameter of 550 µm. Dynamic mask projection combined with fast scanning offers a scalable route to high-throughput laser nanoprocessing and is relevant to fabrication and processing of nanomaterials, digital mask lithography, and micro- and nanomachining.

Formation and stability of tribofilms during friction process are critical to the tribological properties of coatings. In this study, an amorphous phase was successfully introduced into the columnar-structured high-entropy nitride (TiAlTaCrZr)N coating by incorporating silicon. The multilayer coating with an amorphous-wrapped nanocrystalline structure readily formed a continuous and stable tribofilm composed of metal oxides and SiO2 under room-temperature friction conditions. Meanwhile, the interlayer interfaces in the multilayer structure effectively release the concentrated stress at crack tips and suppress crack propagation, which reduced the friction coefficient to 0.43 and decreased the wear rate by 69.8% by comparing with the case without tribofilm. In addition, this composite structure refines the grains and restricts the plastic flow of internal dislocations, while the amorphous phase structure enhances the coordination capability of plastic deformation. Consequently, the coating exhibited a simultaneous increase in hardness by 9.3% and toughness by 32.1%, while achieving an adhesion of 130 N. This strategy that synergistically enhances the hardness, toughness and wear resistance of coatings via interfacial engineering and tribochemically induced evolution provides a valuable design guideline for the development of advanced wear-resistant coatings.