Carbon nanotubes (CNTs) deposited by plasma-enhanced chemical vapor deposition on ${\mathrm{Si}}_3{\mathrm{N}}_4/\mathrm{Si}$ substrates have been investigated as resistive gas sensors for ${\mathrm{NO}}_2.$ Upon exposure to ${\mathrm{NO}}_{\text{2,}}$ the electrical resistance of the CNTs was found to decrease. The maximum variation of resistance to ${\mathrm{NO}}_2$ was found at an operating temperature of around $\text{165\hspace{0.05em}°}\mathrm{C}.$ The sensor exhibited high sensitivity to ${\mathrm{NO}}_2$ gas at concentrations as low as 10 ppb, fast response time, and good selectivity. A thermal treatment method, based on repeated heating and cooling of the films, adjusted the resistance of the sensor film and optimized the sensor response to ${\mathrm{NO}}_2.$

In this work a combined experimental and theoretical study on carbon nanotube (CNT) based system for gas sensing applications is reported. Carbon nanotubes thin films have been deposited by plasma-enhanced chemical vapor deposition on ${\mathrm{Si}}_3{\mathrm{N}}_4/\mathrm{Si}$ substrates provided with Pt electrodes. Microstructural features as determined by scanning electron microscopy, transmission electron microscopy, and Raman spectroscopy highlight the growth of defective tubular carbon structures. The electrical resistivity of the CNT film shows a semiconductinglike temperature dependence and a p-type response with decreasing electrical resistance upon exposure to ${\mathrm{NO}}_2$ gas (100 ppb). No response has been found by exposing the film to CO gas in the temperature range between 25 and 250 °C. In order to obtain a theoretical validation of the experimental results, the equilibrium position, charge transfer, and density of states are calculated from first principles for the $\mathrm{CNT}+\mathrm{CO}$ and $\mathrm{CNT}+{\mathrm{NO}}_2$ systems. Our spin-unrestricted density functional calculations show that ${\mathrm{NO}}_2$ retains its spin-polarized state upon adsorption. Both CO and ${\mathrm{NO}}_2$ molecules adsorb weakly on the tube wall, with essentially no charge transfer between the tube and molecules. The electronic properties of CNTs are sensitive to the adsorption of ${\mathrm{NO}}_2,$ due to an acceptorlike peak close to the tube valence-band maximum, while they are insensitive to the CO adsorption. According to the experimental findings, our theoretical results suggest that gas-induced modification of the density of states close to the Fermi level might significantly affect the transport properties of nanotubes.