With the advantages of simple structure, low power consumption, no electromagnetic interference, and fast response, piezoelectric pumps (PPs) have been widely used in the fields of chip cooling, biomedical applications, chemical applications, and fuel supply applications. In recent decades, scholars have proposed various PPs, and this article reviews the recent research results. In this review, according to the “valve” structure, PPs are divided into valve-less piezoelectric pumps (VLPPs), valve-based piezoelectric pumps (VBPPs), and piezoelectric pumps with valve and valve-less state transitions (PPVVSTs). Firstly, the design methods of typical structures were discussed, and comparisons were made in terms of driving frequency, driving voltage, output pressure, flow rate, structure materials, and pump size. The advantages and disadvantages of VLPPs, VBPPs, and PPVVSTs were analyzed. Then, we compared the driving parameters, output performance, structure materials, and pump size of single-chamber piezoelectric pumps (SCPs) and multi-chamber piezoelectric pumps (MCPs) and analyzed the advantages and disadvantages of SCPs and MCPs. Optimization methods proposed in recent years have been summarized to address the issues of the cavitation phenomenon, the liquid back-flow problem, and low output performance in PPs. Subsequently, the application research of PPs and the distribution of academic achievements were discussed. Finally, this review was summarized, and future research hot spots for PPs were proposed. The main contribution of this review is to provide piezoelectric pump (PP) researchers with a certain understanding of the structural design, optimization methods, practical applications, and research distribution of PPs, which can provide theoretical guidance for future research.

In previous studies, a valveless piezoelectric pump with arc-shaped tubes (VPPAST) based on the Coriolis Effect was proposed. To promote the application of VPPAST in the field of navigation and guidance, it is vital to further explore the influences of the layout and structural parameters of arc-shaped tubes on the flow rate. Accordingly, in this study, the analysis of flow characteristics of fluid in arc-shaped tubes was conducted, and the velocity difference between the clockwise and counterclockwise flow of the liquid was reduced. Eventually, the flow equations of three layout modes of arc-shaped tubes were established. VPPAST with anomalous-direction arc-shaped tubes, single-arc-shaped tube, and same-direction arc-shaped tubes were produced using 3D printing technology. In addition, the valveless piezoelectric pump with the anomalous-direction arc-shaped tubes (VLPPADA) with different parameter flow tubes were also fabricated. Based on the resultant flow rates of each piezoelectric pump, it was demonstrated that the flow rate of the VLPPADA was the highest under the same driving conditions, and the flow rate can be determined as 1.72 mL/min when the driving voltage was set as 160 V at 14 Hz. It indicated that the pump flow rate of VLPPADA was directly proportional to the base radius and width of the arc-shaped tube.

Linear ultrasonic motors (LUSMs) occupy an important position in the field of high-precision actuation due to their advantages of simple structure, high control accuracy and direct linear motion generation. This review first classifies LUSMs according to wave modes into traveling wave linear ultrasonic motors (TWLUSMs) and standing wave linear ultrasonic motors (SWLUSMs). Among them, TWLUSMs include the straight beam type and the annular beam type, while SWLUSMs consist of the single-foot type and the multi-foot type. In addition, the working principles of TWLUSMs and SWLUSMs are elaborated. The structural characteristics and performance parameters of different types of ultrasonic motors (USMs) are sorted out, and the analysis shows that SWLUSMs are significantly superior to TWLUSMs in terms of output speed and output force. This review summarizes the application status of LUSMs in fields such as biomedicine, deep-sea exploration, aerospace and precision manufacturing, and finally outlines the development trends of LUSMs from the aspects of miniaturization and lightweighting, extreme environment adaptability and intelligent upgrade. This review provides a comprehensive reference for the structural design, performance improvement and application expansion of LUSMs.