Kenichi Yamazaki

Mr. Kenichi Yamazaki


Research Focus & Metrics

Academic Career Length

1Year (2026-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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17 March 2026 in Plasma
Verified
Journal Article
Open access
PDF file
KYKenichi Yamazaki
Kenichi Yamazaki
HYHiroyuki Yasui
Hiroyuki Yasui
TNTsuyoshi Noguchi
Tsuyoshi Noguchi
YSYuma Suenaga
Yuma Suenaga
AOAkitoshi Okino
Akitoshi Okino
Atmospheric-pressure plasma-enhanced chemical vapor deposition (AP-PECVD) enables low-temperature coating in open air, yet the interplay between precursor activation and ambient-derived species remains unclear. Here, thin films from an amine precursor are deposited using a helium plasma and characterized by gas chromatography–mass spectrometry (GC-MS), a quartz crystal microbalance (QCM), and X-ray photoelectron spectroscopy (XPS). GC-MS indicates partial precursor conversion and formation of oxygen- and nitrogen-containing products, consistent with participation of ambient air and moisture. QCM identifies a limited precursor-concentration window in which mass increases monotonically during plasma exposure and remains constant after shutdown; outside this window, post-discharge mass loss occurs, indicating desorption of weakly bound species. XPS confirms carbon-rich films incorporating oxygen- and nitrogen-containing functionalities and complete substrate coverage at higher precursor concentrations.