Advances in nanofabrication and nano-scale measurement methods now allow for fabrication of highly detailed nanometer-scale topographic features. As geometric features greatly impact the formation of an electromagnetic field in response to incident light, this in turn calls for the study of the effects of new features of nanostructures on their performance in applications such as localized surface plasmon resonance (LSPR) sensing. This paper studies the effects of vertex features of a single nanostructure on its LSPR properties. A general relationship between the LSPR spectra and the vertex features of a nanoparticle is established. The results of electrodynamics calculations show that a delta-star with a relatively small vertex angle exhibits a bigger resonant wavelength than one with a large vertex angle. Moreover, the sensing performance initially increases, and then decreases as angular size of the vertices increases, with a turning point of 30°. It is also shown that for nanostars with different numbers of vertices, the resonant wavelength undergoes a blue shift and the sensing performance grows poorer as the number of vertices increases. A regular vertex angle of 30° displays the greatest figure of merit (FOM) value for LSPR applications, approximately 9.5 RIU⁻¹.

A sensitive volatile organic vapor sensor based on the LSPR properties of silver triangular nanoprisms is proposed in this paper. The triangular nanoprisms were fabricated by a nanosphere lithography (NSL) method. They have sharp vertices and edges, and are arranged in an ideal hexangular array. These characteristics ensure that they exhibit an excellent LSPR spectrum and a high sensitivity to the exterior environment changes. The LSPR spectra responding to ethanol vapor and four other volatile organic vapors—acetone, benzene, hexane and propanol—were measured with a UV-vis spectrometer in real time. Compared with the other four vapors, ethanol exhibits the highest sensitivity (~0.1 nm/mg L⁻¹) and the lowest detection limit (~10 mg/L) in the spectral tests. The ethanol vapor test process is also fast (~4 s) and reversible. These insights demonstrate that the triangular nanoprism based nano-sensor can be used in ethanol vapor detection applications.

A silver nanoparticle-modified evanescent field optical fiber sensor based on a MEMS microchannel chip has been successfully fabricated. Experimental results show that the sensor response decreases linearly with increasing concentration of analyte. Over a range of methylene blue concentrations from 0 to 0.4 μmol/mL, the sensor response is linear (R = 0.9496). A concentration variation of 0.1 μmol/mL can cause an absorbance change of 0.402 dB. Moreover, the optical responses of the same sensing fiber without decoration and modified with silver nanoparticles have also been compared. It can be observed that the output intensity of the Ag nanoparticle-modified sensor is enhanced and the sensitivity is higher. Meanwhile, the absorbance spectra are found to be more sensitive to concentration changes compared to the spectra of the peak wavelength.

Polyhedral nanostructures are widely used to enable localized surface plasmon resonance (LSPR). In practice, vertices of such structures are almost always truncated due to limitations of nanofabrication processes. This paper studies the effects of vertex truncation of polyhedral nanostructures on the characteristics of LSPR sensing. The optical properties and sensing performance of triangular nanoplates with truncated vertices are investigated using electrodynamics analysis and verified by experiment. The experimental results correlated with simulation analysis demonstrate that the fabricated triangular nanoplate array has a truncation ratio, defined as the length of truncation along an edge of the triangle over the edge length, of approximately 12.8%. This significantly influences optical properties of the nanostructures, resulting in poorer sensing performance. These insights can be used to guide the design and fabrication of nanostructures for high performance LSPR sensors.

Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the electrostatic repulsive principle and the electrostatic attractive principle. By taking advantage of the electrostatic repulsive mode, the common “pull-in” instability can be lessened to enlarge the displacement, and by applying the electrostatic attractive mode, the out-of-plane displacement is further enlarged. The implications of changing the actuator’s physical dimensions are discussed, along with the two-layer polysilicon surface microfabrication process used to fabricate such an actuator. The static characteristics of the out-of-plane displacement versus the voltage of both modes are tested, and displacements of 1.4 μm and 0.63 μm are obtained at 130 V and 15 V, respectively. Therefore, a total stroke of 2.03 μm is achieved, more than 3 fold that of the electrostatic attractive mode, making this actuator useful in optical Micro-Electro-Mechanical Systems (MEMS) and Radio Frequency (RF) MEMS applications.