In this study, WO₃–Nb₂O₅ electrochromic films and an ITO/WO₃–Nb₂O₅/Nb₂O₅/NiVO_x/ITO all-solid-state electrochromic device were deposited using fast-alternating bipolar-pulsed magnetron sputtering using tungsten and niobium targets. The influence of different sputtering powers from the niobium target on the refractive index, extinction coefficient, optical modulation, coloration efficiency, reversibility, and durability of the WO₃–Nb₂O₅ films is discussed. The aim of this work is to find the suitable Nb proportion to increase durability and less negative effect in the electrochromic performance of Nb₂O₅-doped WO₃ films. The lifetime of the WO₃–Nb₂O₅ films is 4 times longer than pure WO₃ films when the sputtering power of the Nb target is higher than 250 W. The results show that WO₃–Nb₂O₅ composite films used for an all-solid-state electrochromic device can sustain over 3 × 10⁴ repeated coloring and bleaching cycles while the transmission modulations can be kept above 20%. The coloring and bleaching response times are 7.0 and 0.7 s, respectively.

${\mathrm{M}\mathrm{g}\mathrm{F}}_2$ films with a columnar microstructure are obliquely deposited on glass substrates by resistive heating evaporation. The columnar angles of the films increases with the deposition angle. Anisotropic stress does not develop in the films with tilted columns. The residual stresses in the films depend on the deposition and columnar angles in a columnar microstructure.

This study investigates the optical constants of ${\mathrm{WO}}_3$ electrochromic films and NiO ion-storage films in bleached and colored states and that of a ${\mathrm{Ta}}_2{\mathrm{O}}_5$ film used as an ion conductor. These thin films were all prepared by electron-beam evaporation and characterized using a spectroscopic ellipsometer. The spectra obtained using a spectrophotometer and those calculated from the optical constants agreed closely. An all-solid thin-film reflective electrochromic device was fabricated and discussed. Its mean contrast ratio of reflectance in the range of 400–700 nm was 37.91.