An accurate and continuous measurement of heat flux is needed in many long-term operation facilities in order to monitor and improve the life of its machinery. A thin film heat flux sensor is usually fabricated via sputtering, according to different spatial arrangements of thermocouple junctions. A novel thin film heat flux sensor was designed, fabricated, and calibrated, but the connection between the thin film and the leads could not be fixed quickly and steadily. For this purpose, in this paper a method to seamlessly integrate the leads and the thin film has been proposed to improve the sensor output signal. The sensor is capable of simultaneously measuring surface heat flux and temperature magnitude, to address the current situation of the single design of heat flux sensors. The novel thin film heat flux sensor is structured as follows: Thirty pairs of NiCr-NiSi thermocouple junctions are deposited in an annular pattern on a well-designed ceramic substrate. Over the annular thermopile, a 2000 nm-thick thermal insulator layer is deposited to create a temperature gradient across the layers. In addition, in this study a new calibration method was used to evaluate the static and dynamic properties of this novel thin film heat flux sensor. The analysis and experimental results show that the heat flux calculated from the sensor output was in good agreement with the value obtained from the pre-calibrated standard sensor. The sensitivity and response time of the novel sensor were measured at 0.06 mV/(kW/m²) and 475 ms, respectively. The heat flux measurements made with the sensor presented good repeatability. The heat-transfer coefficient of the Al₂O₃ thin film was 4.477 w/(m∙k) for the novel thin film heat flux sensor described in this paper.

The super-thin silicon oxynitride (SiO_xN_y) films were deposited onto the N doped polyethylene terephthalate (PET) surface. Varying the N doping parameters, the different chemical bond structures were obtained at the interface between the SiO_xN_y film and the PET surface. X-ray photoelectron spectra results showed that at the initial stage of SiO_xN_y film growth, the C=N bonds could be broken and C–N–Si crosslink bonds could be formed at the interface of SiO_xN_y/PET, which C=N bonds could be formed onto the PET surface during the N doping process. At these positions, the SiO_xN_y film could be crosslinked well onto the PET surface. Meanwhile, the doped N could crosslink the [SiO₄] and [SiN₄] tetrahedrons, which could easily form the dense layer structure at the initial stage of SiO_xN_y film growth, instead of the ring and/or chain structures of [SiO₄] tetrahedrons crosslinked by O. Finally, from the point of applying SiO_xN_y/PET complex as the substrate, the present work reveals a simple way to crosslink them, as well as the crosslink model and physicochemical mechanism happened at the interface of complex.

Aero-engine turbine stator blades are often used in harsh environments with high temperatures and high pressure and are prone to fatigue fractures. Real-time and accurate monitoring of blade surface stress and strain is critical to ensure safe operation. In this study, thin-film strain gauges (TFSGs) that can be used in high-temperature environments above 1000 °C were designed and fabricated using a PtRh6 thin film as the sensitive material. The hysteresis effect of the stress transfer upon establishing a thermo-mechanical coupling finite element model of the Inconel718 high-temperature nickel-based alloy equal-strength beam PtRh6 TFSGs was analyzed and the optimal combination of thin-film thickness and longitudinal grid length of wire-grid TFSGs was determined. In order to solve the problem of high-temperature insulation, the insulating properties of a single-layer Al₂O₃ insulating film, a single-layer ZrO₂ insulating film, a double-layer Al₂O₃/ZrO₂ composite insulating film, and a four-layer Al₂O₃/ZrO₂/Al₂O₃/ZrO₂ composite insulating film at high temperature were compared and studied using scanning electron microscopy to analyze the microscopic morphology and composition of the four insulating film structures. The results showed that the four-layer Al₂O₃/ZrO₂/Al₂O₃/ZrO₂ composite insulating film had the best insulating properties at high temperatures. On this basis, an Al₂O₃/ZrO₂/Al₂O₃/ZrO₂ composite insulating film, PtRh6 sensitive layer, and Al₂O₃ protective film were sequentially deposited on a high-temperature nickel-based alloy equal-strength beam using DC pulsed magnetron sputtering technology to obtain an Inconel718 high-temperature nickel-based alloy equal-strength beam PtRh6 TFSG. Its gauge factor (GF) and temperature coefficient of resistance (TCR) were calibrated, and the results showed that the sensor could be used in harsh environments of 1000 °C. The above results provide new ideas for measuring stress and strain in aerospace under high-temperature and high-pressure environments.

During the titanium alloy milling process, high temperatures in the tool-chip contact area will affect the tool life and precision of titanium alloy machining. Therefore, it is essential to measure the temperature of the tool-chip contact area continuously. In this paper, a finite element simulation model of the milling process was established using ABAQUS2020 to obtain the highest temperature location in the tool-chip contact area when milling titanium alloy. The integration of the wire with the alumina ceramic substrate formed an integrated wire substrate. Furthermore, NiCr, NiSi, and SiO₂ films were deposited on the substrate sequentially using the DC pulsed magnetron sputtering technique. Finally, its microscopic morphology and static and dynamic performance were tested. The results show that the developed thin-film thermocouple temperature sensor has a Seebeck coefficient of 40.72 μV/°C and a dynamic response time of 0.703 ms. The application of the sensor to our titanium alloy milling experiments showed that the sensor can monitor the transient temperature in the tool-chip contact area, and its temperature measurement performance showed no detrimental effect from wearing. The effect of each milling parameter on the milling temperature was analyzed using ANOVA, and a regression model with an R-sq of 96.76% was obtained for the milling temperature.