Marco Sebastiani

Dr. Marco Sebastiani

Università degli studi Roma Tre, Roma, Italy
orcid

Research Focus & Metrics

Academic Career Length

23Years (2004-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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1 March 2018 in Journal of Vacuum Science & Technology A
Verified
Journal Article
Open access
PDF file
Gregory AbadiasGregory Abadias
Gregory Abadias
ECEric Chason
Eric Chason
Jozef KeckesJozef Keckes
Jozef Keckes
Marco SebastianiMarco Sebastiani
Marco Sebastiani
GTGregory B. Thompson
Gregory B. Thompson
LMLudvik Martinu
Ludvik Martinu
The issue of stress in thin films and functional coatings is a persistent problem in materials science and technology that has congregated many efforts, both from experimental and fundamental points of view, to get a better understanding on how to deal with, how to tailor, and how to manage stress in many areas of applications. With the miniaturization of device components, the quest for increasingly complex film architectures and multiphase systems and the continuous demands for enhanced performance, there is a need toward the reliable assessment of stress on a submicron scale from spatially resolved techniques. Also, the stress evolution during film and coating synthesis using physical vapor deposition (PVD), chemical vapor deposition, plasma enhanced chemical vapor deposition (PECVD), and related processes is the result of many interrelated factors and competing stress sources so that the task to provide a unified picture and a comprehensive model from the vast amount of stress data remains very challenging. This article summarizes the recent advances, challenges, and prospects of both fundamental and applied aspects of stress in thin films and engineering coatings and systems, based on recent achievements presented during the 2016 Stress Workshop entitled “Stress Evolution in Thin Films and Coatings: from Fundamental Understanding to Control.” Evaluation methods, implying wafer curvature, x-ray diffraction, or focused ion beam removal techniques, are reviewed. Selected examples of stress evolution in elemental and alloyed systems, graded layers, and multilayer-stacks as well as amorphous films deposited using a variety of PVD and PECVD techniques are highlighted. Based on mechanisms uncovered by in situ and real-time diagnostics, a kinetic model is outlined that is capable of reproducing the dependence of intrinsic (growth) stress on the grain size, growth rate, and deposited energy. The problems and solutions related to stress in the context of optical coatings, inorganic coatings on plastic substrates, and tribological coatings for aerospace applications are critically examined. This review also suggests strategies to mitigate excessive stress levels from novel coating synthesis perspectives to microstructural design approaches, including the ability to empower crack-based fabrication processes, pathways leading to stress relaxation and compensation, as well as management of the film and coating growth conditions with respect to energetic ion bombardment. Future opportunities and challenges for stress engineering and stress modeling are considered and outlined.

1 October 2012 in Construction and Building Materials
Verified
Journal Article
Closed access
MBM. Berra
M. Berra
FCF. Carassiti
F. Carassiti
TMT. Mangialardi
T. Mangialardi
APA.E. Paolini
A.E. Paolini
Marco SebastianiMarco Sebastiani
Marco Sebastiani

1 December 2015 in Current Opinion in Solid State and Materials Science
Verified
Journal Article
Closed access
Marco SebastianiMarco Sebastiani
Marco Sebastiani
KJK.E. Johanns
K.E. Johanns
EHE.G. Herbert
E.G. Herbert
GPG.M. Pharr
G.M. Pharr

1 June 2015 in Materials & Design (1980-2015)
Verified
Journal Article
Closed access
RAR. Ali
R. Ali
Marco SebastianiMarco Sebastiani
Marco Sebastiani
EBE. Bemporad
E. Bemporad

1 December 2010 in Surface and Coatings Technology
Verified
Journal Article
Closed access
Alexander KorsunskyAlexander Korsunsky
Alexander Korsunsky
Marco SebastianiMarco Sebastiani
Marco Sebastiani
EBEdoardo Bemporad
Edoardo Bemporad

1 September 2009 in Materials Letters
Verified
Journal Article
Closed access
Alexander KorsunskyAlexander Korsunsky
Alexander Korsunsky
Marco SebastianiMarco Sebastiani
Marco Sebastiani
EBEdoardo Bemporad
Edoardo Bemporad