With the increasing demand for devices in miniaturization, accuracy, and low power consumption, developing microdevices in the form of piezoelectric thin films is significant for microelectromechanical systems (MEMS) applications. Piezoelectric thin films offer advantages of miniaturization and low power consumption, holding immense potential in MEMS, especially with advancements in micro-nanomanufacturing technologies. In this review, we highlighted the compelling piezoelectric properties and summarized the latest research progress of thin films, with an emphasis on recent advances in piezoelectric MEMS. We mainly introduced the recent developments on different types of piezoelectric MEMS (piezo-MEMS), along with the descriptions of piezoelectric effects, film preparation, film properties, and device indicators. We have emphasized the comparison of MEMS with different piezoelectric materials and methods for improving devices. The recent achievements of piezoelectric thin films in MEMS applications and the future development of MEMS applications are also reviewed.
The axial resolution of confocal microscopy is not only dependent on optical characteristics but also on the utilized peak extraction algorithms. In previous evaluations of peak extraction algorithms, sample surface height is generally assumed to be zero, and only sampling-noise-induced peak extraction uncertainty was analyzed. Here we propose a sample surface-height-dependent (SHD) evaluation model that takes the combined considerations of sample surface height and noise for comparisons of algorithms’ performances. Monte Carlo simulations were first conducted on the centroid algorithm and several nonlinear fitting algorithms such as the parabola fitting algorithm, Gaussian fitting algorithm, and fitting algorithm. Subsequently, the evaluation indicators, including mean peak extraction error and mean uncertainty were suggested for the algorithms’ performance ranking. Finally, experimental verifications of the SHD model were carried out using a fiber-based chromatic confocal system. From our simulations and experiments, we demonstrate that sample surface height is a critical influencing factor in peak extraction computation in terms of both the accuracy and standard deviations. Compared to the conventional standard uncertainty evaluation model, our SHD model can provide a more comprehensive characterization of peak extraction algorithms’ performance and offer a more flexible and consistent reference for algorithm selection.
Accurate and reliable peak extraction of axial response signals plays a critical role in confocal microscopy. For axial response signal processing, nonlinear fitting algorithms, such as parabolic, Gaussian or sinc2 fitting may cause significant systematic peak extraction errors. Also, existing error compensation methods require a priori knowledge of the full-width-at-half-maximum of the axial response signal, which can be difficult to obtain in practice. In this paper, we propose a generalised error compensation method for peak extraction from axial response signals. This full-width-at-half-maximum-independent method is based on a corrected parabolic fitting algorithm. With the corrected parabolic fitting algorithm, the systematic error of a parabolic fitting is characterised using a differential equation, following which, the error is estimated and compensated by solving this equation with a first-order approximation. We demonstrate, by Monte Carlo simulations and experiments with various axial response signals with symmetrical and asymmetrical forms, that the corrected parabolic fitting algorithm has significant improvements over existing algorithms in terms of peak extraction accuracy and precision.
17 January 2022 in IEEE/ASME Transactions on Mechatronics
Calibration is a fundamental step in fringe projection profilometry development. Among various methods, hybrid calibration is a promising solution given its high flexibility and sensing speed. However, existing approaches suffer the problem of limited accuracy and convenience. For example, customized high-accuracy artifacts with complex operations are usually required. This article reports a hybrid method with improved accuracy and operability, based on a unique back-projection and nonlinear epipolar sampling analysis. This method is performed in three steps: stereo calibration, residual distortion analysis, and phase 3-D mapping tabulation; the last two are pure computations without manual operations. The method is straightforward and cost-effective since only a checkerboard-based stereo calibrating operation is required. It is flexible without checkerboard poses to be known and also highly accurate because systematic distortions are almost compensated. The eventually obtained phase 3-D mapping table is computationally efficient for high-speed sensing. Our experiments confirm that a relative measurement error of 0.01% relative to the field-of-view has been finally achieved.
In chromatic confocal microscopy, the signal characteristics influence the accuracy of the signal processing, which in turn determines measurement performance. Thus, a full understanding of the spectral characteristics is critical to enhance the measurement performance. Existing spectral models only describe the signal intensity-wavelength characteristics, without taking the displacement-wavelength relation into consideration. These models require prior knowledge of the optical design, which reduces the effectiveness in the optical design process. In this paper, we develop a two-dimensional spectral signal model to describe the signal intensity-wavelength-displacement characteristics in chromatic confocal microscopy without prior knowledge of the optical design layout. With this model, the influence of the dimensional characteristics of the confocal setup and the displacement-wavelength characteristics and monochromatic aberrations of the hyperchromatic objective are investigated. Experimental results are presented to illustrate the effectiveness of our signal model. Using our model, further evaluation of the spectral signal can be used to enhance the measurement performance of chromatic confocal microscopy.
Background: The ischemia–reperfusion (IR) environment during deep hypothermic circulatory arrest (DHCA) cardiovascular surgery is a major cause of acute kidney injury (AKI), which lacks preventive measure and treatment. It was reported that cold inducible RNA-binding protein (CIRP) can be induced under hypoxic and hypothermic stress and may have a protective effect on multiple organs. The purpose of this study was to investigate whether CIRP could exert renoprotective effect during hypothermic IR and the potential mechanisms. Methods: Utilizing RNA-sequencing, we compared the differences in gene expression between Cirp knockout rats and wild-type rats after DHCA and screened the possible mechanisms. Then, we established the hypothermic oxygen–glucose deprivation (OGD) model using HK-2 cells transfected with siRNA to verify the downstream pathways and explore potential pharmacological approach. The effects of CIRP and enarodustat (JTZ-951) on renal IR injury (IRI) were investigated in vivo and in vitro using multiple levels of pathological and molecular biological experiments. Results: We discovered that Cirp knockout significantly upregulated rat Phd3 expression, which is the key regulator of HIF-1α, thereby inhibiting HIF-1α after DHCA. In addition, deletion of Cirp in rat model promoted apoptosis and aggravated renal injury by reactive oxygen species (ROS) accumulation and significant activation of the TGF-β1/p38 MAPK inflammatory pathway. Then, based on the HK-2 cell model of hypothermic OGD, we found that CIRP silencing significantly stimulated the expression of the TGF-β1/p38 MAPK inflammatory pathway by activating the PHD3/HIF-1α axis, and induced more severe apoptosis through the mitochondrial cytochrome c-Apaf-1-caspase 9 and FADD-caspase 8 death receptor pathways compared with untransfected cells. However, silencing PHD3 remarkably activated the expression of HIF-1α and alleviated the apoptosis of HK-2 cells in hypothermic OGD. On this basis, by pretreating HK-2 and rats with enarodustat, a novel HIF-1α stabilizer, we found that enarodustat significantly mitigated renal cellular apoptosis under hypothermic IR and reversed the aggravated IRI induced by CIRP defect, both in vitro and in vivo. Conclusion: Our findings indicated that CIRP may confer renoprotection against hypothermic IRI by suppressing PHD3/HIF-1α-mediated apoptosis. PHD3 inhibitors and HIF-1α stabilizers may have clinical value in renal IRI.