The functionality of the intestine is strongly affected by the microbiome, food, drugs and toxins. This influence can lead to a variety of diseases, which in turn can affect the entire organism1. For studying the electrophysiological processes of the intestine in health and disease in vitro, a novel microelectrode system is developed and then characterized by electrochemical impedance spectroscopy (EIS). Additionally, EIS will be used to investigate the impedance behavior of different electrode-electrolyte and electrode-cell interfaces. In contrast to conventional planar microelectrode arrays, this novel system utilizes a three-dimensional spiral-like design. This enables to spatially detect the electrophysiological processes of complex tissue-like cell structures (see Figure 1). To ensure flexibility and biocompatibility, a polyimide-based insulating structure with an embedded titanium-gold-titanium metal stack is used. While titanium serves as an adhesion-promoting layer between gold and polyimide, the gold layer itself is used as the electrode material. The sensor is fabricated in a planar configuration on a glass wafer (see schematic representation of the process flow in Figure 2 and the fabricated sensor in Figure 3). First, a 50 nm adhesion-promoting aluminum layer is sputtered on the glass substrate and pre-structured by lithography and wet-etching. An 11 µm thick polyimide layer is then spin-coated and subsequently imidized by a curing process. Then, a metal stack of 20 nm titanium, 200 nm gold and 20 nm titanium is deposited by e-beam evaporation. The conductor tracks of the spiral-shaped electrodes are structured by lithography and wet-etching. An 2 µm thick polyimide layer serves to insulate the electrodes, which is again imidized by curing. The electrode and external contact pad areas are opened by reactive ion etching. For this purpose, a 150 nm sputtered and subsequently structured aluminum layer is used as a hard mask. A combination of SF6 and O2 mixture serves as the etching gas. An identical process sequence, which differs only in the mask of the lithography step is used to structure the polyimide frame and thus the contour of the system. Finally, the aluminum sacrificial layer is etched, after which the 3D system can be characterized electrochemically. For all electrode-characterizing electrochemical methods, a potentiostatic three-electrode setup with a 3 M KCl saturated Ag/AgCl reference electrode and a 2 mm gold disc counter electrode in a 0.1 M NaCl electrolyte is used. First, the devices are treated in an oxygen plasma to remove impurities from the openings of the electrodes. Cyclic voltammetry measurements are carried out to receive a stable open circuit potential (OCP), which is then later used as a DC-bias operating point for the EIS measurement. For this, 10 consecutive scans are performed at switching voltages between + 0.1 V and + 0.5 V against Ag/AgCl (3 M KCl) at a scan rate of 0.5 V/s. To obtain reproducible measurement results, the electrolyte is regenerated and the immersion time of the microelectrodes in the electrolyte is kept constant. The EIS measurements are then performed with a sinusoidal AC voltage of 10 mV (amplitude) and a DC operating point of 0 V against OCP in a frequency range from 100 kHz to 1 Hz for three measurement cycles. The electrolyte and the voltage are selected in such a way that faradaic reactions are suppressed and thus the main contribution of the current pertains to charging and discharging of the electric double-layer of the electrode-electrolyte interface. The measurement data is further analyzed in a frequency range where the electric double-layer capacitance is predominant and then fitted to an electrical equivalent circuit using complex non-linear least squares method (see Figure 4). The circuit describes a resistance, which is composed of solution and routing resistance, in series with a parallel circuit consisting of double-layer capacitance and charge-transfer resistance. Due to non-ideal behavior, the double-layer capacitance is modelled by a constant phase element, which is then converted into an average double-layer capacitance using an equation described by Brug et al.2. Further EIS measurements will be carried out and modelled using more complex electrical equivalent circuits. For example, more application-based electrolytes such as cell culture medium and hydrogels with and without cells will be used. This serves not to characterize the electrode itself, but to investigate the impedance behavior of the electrode-electrolyte or the electrode-cell interface. Ultimately, electrophysiological recordings of enteric neurons will be spatially evaluated by the 3D microelectrode system. References B. Niesler et al., Nature reviews. Gastroenterology & hepatology, 18(6), 393–410 (2021). G. J. Brug et al., Journal of Electroanalytical Chemistry and Interfacial Electrochemistry, 176(1-2), 275–295 (1984). Figure 1