The effect of the high pulse current and the duty cycle on the deposition rate in high power pulsed magnetron sputtering (HPPMS) is investigated. Using a Cr target and the same average target current, deposition rates are compared to dc magnetron sputtering (dcMS) rates. It is found that for a peak target current density of up to , HPPMS and dcMS deposition rates are equal. For , optical emission spectroscopy shows a pronounced increase of the signal ratio. In addition, a loss of deposition rate, which is attributed to self-sputtering, is observed.