The characterization of a high-precision component with its dimensions has become a key problem in ensuring the performance of system parts. A touch trigger probe plays an important role in experimentally measuring these properties. In this study, a new high-resolution touch trigger probe based on a modified optical lever method is proposed. Only one optical sensor is adopted. The sensing principle of the developed probe in 3D is investigated through the probe’s sensitivity models. An optimizing design of the elastic suspension is demonstrated. Experiments on probe performance are conducted by measuring a step height and a gauge block. Experimental results indicate that the probe achieves a resolution of up to 1 nm in 3D and a measurement standard deviation of 18.3 nm. The probe has a permissible range of ± $20~\mu \text{m}$ in the ${x}/{y}$ -axis and $20~\mu \text{m}$ in ${z}$ -axis. The drift of the probe is 5.2 nm within 30 min. The comprehensive uncertainty of the probing system is 18.45 nm. The developed probe can be used in micro/nano coordinate measuring machines.

The structural deformations caused by environmental changes in temperature, vibration, and other factors are harmful to the stability of high precision measurement equipment. The stability and optimal design method of a 2D optoelectronic angle sensor have been investigated in this study. The drift caused by structural deformations of the angle sensor has been studied and a drift error model has been achieved. Key components sensitive to thermal and vibrational effects were identified by error sensitivity analysis and simulation. The mounts of key components were analyzed using finite element analysis software and optimized based on the concept of symmetric structures. Stability experiments for the original and optimized angle sensors have been carried out for contrast. As a result, the stability of the optimized angle sensor has been improved by more than 63%. It is verified that the modeling and optimal design method is effective and low-cost, which can also be applied to improve the stability of other sensors with much more complex principles and structures.

To meet the requirement of high precision measurement of coordinate measurement machine system, a compact microprobe has been designed for 3D measurement in this paper. Aiming to reduce the influences of signal coupling during the probing process, the probe has been designed by adopting two elastic mechanisms, in which the horizontal and vertical motions of the probe tip can be separated by differential signals of quadrant photodetectors in each elastic mechanism. A connecting rod has been designed to transfer the displacement of the probe tip in vertical direction from lower to upper elastic mechanisms. The sensitivity models in horizontal and vertical directions have been established, and the sensor sensitivity has been verified through experiments. Furthermore, the signal coupling of three axes has been analyzed, and mathematical models have been proposed for decoupling. The probing performance has been verified experimentally.

Micro-coordinate metrology is currently limited when the probing system works on the microscale, especially when measuring high aspect ratio microstructures with horizontal internal dimensions below $100~\mu \text{m}$ due to the oversized probe ball tip and short stylus length. The accuracy and reliability of the measurement are also influenced by the surface interface effects. To solve these existing problems, we developed a nano precision probing system with a micro monolithic tungsten ball tip. Initially, the surface interaction effects during the tip-surface approaching tests are investigated. On this basis, the probe was designed to use surface interaction forces as the triggering force. The sensing principle of the optimized optic lever light paths is investigated and analyzed to acquire the isotropic sensitivity. The elastic mechanism with isotropic stiffness suitable for small triggering forces is designed through ANSYS software. The modeling of the probe and the mechanical design as well as the assembly of the micro stylus are reported. Experimental tests demonstrate that the probe can operate in a noncontact mode with 1-nm resolution, and the repeatability is better than 16 nm. The permissible measurement range is $\pm 10~\mu \text{m}$ in the $x$ - and $y$ -axes and $10~\mu \text{m}$ in the $z$ -axis. The comprehensive uncertainty of the probing system is 16 nm. The probe is also verified by measuring a micro hole and a microgroove. The developed probing system is well-suited for high aspect ratio microstructure measurements with horizontal internal dimensions below $100~\mu \text{m}$ .