This paper reports on the study of microporous polydimethylsiloxane (PDMS) foams as a highly deformable dielectric material used in the composition of flexible capacitive pressure sensors dedicated to wearable use. A fabrication process allowing the porosity of the foams to be adjusted was proposed and the fabricated foams were characterized. Then, elementary capacitive pressure sensors (15 × 15 mm² square shaped electrodes) were elaborated with fabricated foams (5 mm or 10 mm thick) and were electromechanically characterized. Since the sensor responses under load are strongly non-linear, a behavioral non-linear model (first order exponential) was proposed, adjusted to the experimental data, and used to objectively estimate the sensor performances in terms of sensitivity and measurement range. The main conclusions of this study are that the porosity of the PDMS foams can be adjusted through the sugar:PDMS volume ratio and the size of sugar crystals used to fabricate the foams. Additionally, the porosity of the foams significantly modified the sensor performances. Indeed, compared to bulk PDMS sensors of the same size, the sensitivity of porous PDMS sensors could be multiplied by a factor up to 100 (the sensitivity is 0.14 %.kPa⁻¹ for a bulk PDMS sensor and up to 13.7 %.kPa⁻¹ for a porous PDMS sensor of the same dimensions), while the measurement range was reduced from a factor of 2 to 3 (from 594 kPa for a bulk PDMS sensor down to between 255 and 177 kPa for a PDMS foam sensor of the same dimensions, according to the porosity). This study opens the way to the design and fabrication of wearable flexible pressure sensors with adjustable performances through the control of the porosity of the fabricated PDMS foams.

This paper reports on the optimization of flexible PDMS-based normal pressure capacitive microsensors dedicated to wearable applications. The operating principle and the fabrication process of such microsensors are presented. Then, the deformations under local pressure of PDMS thin films of thicknesses ranging from 100 μm to 10 mm are studied by means of numerical simulations in order to foresee the sensitivity of the considered microsensors. The study points out that, for a given PDMS type, the sensor form ratio plays a major role in its sensitivity. Indeed, for a given PDMS film, the expected capacitance change under a 10 N load applied on a 1.7 mm radius electrode varies from a few percent to almost 40% according to the initial PDMS film thickness. These observations are validated by experimental characterizations carried out on PDMS film samples of various thicknesses (10 μm to 10 mm) and on actual microsensors. Further computations enable generalized sensor design rules to be highlighted. Considering practical limitations in the fabrication and in the implementation of the actual microsensors, design rules based on computed form ratio optimization lead to the elaboration of flexible pressure microsensors exhibiting a sensitivity which reaches up to10%/N.

This paper reports on the optimization of flexible PDMS-based normal pressure capacitive micro-sensors dedicated to wearable applications. The deformation under a normal force of PDMS thin films of thicknesses ranging from 40 µm to 10 mm is firstly experimentally studied. This study points out that for capacitive micro-sensors using bulky PDMS thin films as deformable dielectric material, the sensitivity to an applied normal load can be optimized thanks to an adequate choice of the so-called form ratio of the involved PDMS thin film. Indeed, for capacitive micro-sensors exhibiting 9 mm 2 electrodes, the capacitance change under a 6 N load can be adjusted from a few percent up to over 35% according to the choice of the load-free thickness of the used PDMS film. These results have been validated thanks to electromechanical characterizations carried out on two flexible PDMS based capacitive normal pressure micro-sensor samples fabricated with two different thicknesses. The obtained results open the way to the enhanced design of PDMS based pressure sensors dedicated to wearable and medical applications. Further works will extend this study to a wider range of sensor dimensions, and using numerical modelling.

This paper focuses on the use of microporous PDMS foams as a highly deformable film to improve the sensitivity of flexible capacitive pressure sensor dedicated to wearable use. A fabrication process allowing the mechanical properties of foams to be adjusted is proposed together with a non-linear behavioral model used to objectively estimate the sensor performances in terms of sensitivity and measurement range. Sensors fabricated and characterized in this study show that the sensitivity and the measurement range can be adjusted from 0.14%/kPa up to 13.07%/kPa, and from 594 kPa to 183 kPa, respectively, while the PDMS film porosity ranges from 0% up to 85%.