To improve the sensitivity of the magnetic tunnel junction(MTJ)sensor, a novel architecture for a double-gap magnetic flux concentrator (MFC) was studied theoretically and experimentally in this paper. The three-dimensional finite element model of magnetic flux was established to optimize the magnetic field amplification factor, with different gaps. The simulation results indicate that the sensitivity of an MTJ sensor with a double-gap MFC can be significantly better than that of a sensor with a traditional single-gap MFC, due to the fact that the magnetic magnification sharply increases with the decrease in effective gap width. Besides this, the half-bridge MTJ sensors with the double-gap MFC were fabricated using photolithography, ion milling, evaporation, and electroplating processes. Experimental results show that the sensitivity of the MTJ sensor increased by ten times compared to the sensor without the double-gap MFC, which underlines the theoretical predictions. Furthermore, there is no significant increase in the sensor noise. The work in this paper contributes to the development of high-performance MTJ sensors.

Magnetic tunnel junction (MTJ) as a key spintronics device can be used for the high-sensitivity magnetic field sensor and high-density non-volatile magnetic random access memory (MRAM). To obtain a high tunneling magnetoresistance (TMR), precise control of the etching process for MTJs is an essential step. In order to investigate the effect of the etching angle on the performance of MTJ devices, a series of MTJ pillars are fabricated by etching with the incidence angle of 10°, 20° and 30°. The prepared samples are characterized by the optical microscopy and SEM, and the R-H curves are also measured and then statistically analyzed. The results reveal that the performance of the MTJ is strongly affected by the IBE process, displaying the uniformity of the pillars edge and MTJ performance will improve as well with the increase of the etching angle. Then, a simplified model based on the re-deposition effect of the etching process is established to explain the experimental phenomena. Furthermore, a newly defined material parameter is introduced in this model and obtained with fitting the experimental results. This proves a valuable way to evaluate the quality of the MTJ stack film without the interference of the device fabrication process.

A highly sensitive superconductor/tunnel magnetoresistance (TMR) composite magnetic sensor was designed and fabricated to satisfy the demands of detecting weak magnetic fields down to the pT range at low frequencies. First, analysis of the 1/f noise provided an optimized design scheme for the TMR unit to reduce the noise level. Then, the key structural parameters of the superconducting flux transformation amplifier (SFTA) were optimized with focus on the bonding quality between SFTA and TMR units using the finite element method to enhance the magnetic field magnification factor. An SFTA–TMR composite method with secondary alignment and multi-step bonding was proposed to fabricate the composite magnetic sensor and ensure the designed bonding gap and alignment accuracy. Experiments showed that the magnetic field sensitivity reached 5 pT/Hz^0.5 (@ 13 Hz), which is beyond the highest level of superconductor/TMR composite magnetic sensors reported to date and is a further step toward the application of weak magnetic field detection.

A novel architecture for the superconductor/magnetoresistance (MR) composite sensor with vertical magnetic flux concentrators (MFCs) was studied theoretically and experimentally in this paper, to enhance the sensor’s sensitivity and resolution. The three-dimensional finite element method (FEM) of the superconducting flux transformation amplifier (SFTA), characterized by the E-J power law, was firstly established to design and optimize the structure of SFTA with MFCs. Then the influence of the key size of MFCs on the gain factor of SFTA was discussed. Finally, a superconductor/TMR composite sensor with specific-sized MFCs was designed and manufactured. Experimental results showed that the sensitivity was increased by 1.84 times, and the magnetic field resolution was improved from 81 pT/Hz ^0.5 to 49 pT/Hz ^0.5 by about 1.63 times after setting vertical MFCs, which all accorded with the FEM simulation prediction result of 1.75 times. The work in this paper contributes to the development of high-performance superconductor/MR composite sensors.

The low frequency magnetic field detection ability of magnetoresistive (MR)sensor is seriously affected by 1/f noise. At present, the method to suppress the influence of low frequency noise is mainly to modulate the measured magnetic field by mechanical resonance. In this paper, a novel modulation concept employing a magnetoelectric coupling effect is proposed. A design method of modulation structure based on an equivalent magnetic circuit model (EMCM) and a single domain model of in-plane moment was established. An EMCM was established to examine the relationship between the permeability of flux modulation film (FMF) and modulation efficiency, which was further verified through a finite element simulation model (FESM). Then, the permeability modulated by the voltage of a ferroelectric/ferromagnetic (FE/FM) multiferroic heterostructure was theoretically studied. Combining these studies, the modulation structure and the material were further optimized, and a FeSiBPC/PMN-PT sample was prepared. Experimental results show that the actual magnetic susceptibility modulation ability of FeSiBPC/PMN-PT reached 150 times, and is in good agreement with the theoretical prediction. A theoretical modulation efficiency higher than 73% driven by a voltage of 10 V in FeSiBPC/PMN-PT can be obtained. These studies show a new concept for magnetoelectric coupling application, and establish a new method for magnetic field modulation with a multiferroic heterostructure.

Superconductor/magnetoresistance (SC/MR) mixed sensor has the advantage of ultra-high sensitivity and is thought to be a promising candidate for weak magnetic field detection. But it has no effect on the magnetic field in the superconducting flux-to-field transformation amplifier (SFTA) plane, which limits its applications in three-dimensional magnetic field detection. Here, we present a new architecture of SC/MR mixed sensor with only one integrated magnetic concentrator (IMC) to realize the in-plane magnetic field measurement. Firstly, the conversion efficiency, defined as the in-plane magnetic changing to out-plane magnetic field by the IMC and SFTA of mixed sensor, was systematic studied by the finite element analysis method, the results show that the high conversion efficiency is from the combined action of superconducting diamagnetism and magnetic concentrator of soft magnetic materials. Then, a serial prototype mixed sensors with different IMC relative configuration sizes were prepared and their experimental performances were obtained. Indeed, the mixed sensor with IMC can simultaneously measure the in-plane and out-of-plane magnetic fields, furthermore, the conversion efficiency changing as the function of the relative configuration size is consistent well with the simulation result. Finally, a three-axis SC/MR mixed sensor scheme and corresponding three-axis magnetic field decoupling method based on this method were also proposed, showing the obvious capability of three-axis magnetic field measurement. Our work is meaningful to the development of a three-axis weak magnetic field detection.