A comprehensive approach to generation of electrothermal models of silicon carbide (SiC) power Schottky diodes is presented. Both the electrical and thermal parts of the model are behavioral. The electrical one was developed in order to accurately represent the nonlinear properties of SiC merged PiN Schottky (MPS) diodes. Its parameters are automatically obtained with a dedicated numerical procedure. The thermal model derivation differs from the earlier approaches because it is based on the analysis of thermal constant spectrum of the temperature response of a modeled device. Simple model generation and parameter extraction procedures are proposed in which no knowledge of technological data is necessary.