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<mml:math display="inline"><mml:mrow><mml:mo>(</mml:mo><mml:msub><mml:mi>TiO</mml:mi><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msub><mml:mo>)</mml:mo></mml:mrow></mml:math>(TiO2) photocatalytic films can be excited only by UV light which is about 4–5% of the overall solar spectrum and the activity under visible light irradiation is very limited. In this study, atomic layer deposition was used to deposit <mml:math display="inline"><mml:mrow><mml:msub><mml:mi>ZrO</mml:mi><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msub></mml:mrow></mml:math>ZrO2 -doped <mml:math display="inline"><mml:mrow><mml:msub><mml:mi>TiO</mml:mi><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msub></mml:mrow></mml:math>TiO2 films which had better visible light response. X-ray diffraction, electron microscopy and Raman, X-ray photoelectron, and UV-visible spectroscopy were used to characterize the films. The photocatalytic activities were measured by decomposition of stearic acid coating. <mml:math display="inline"><mml:mrow><mml:msub><mml:mi>ZrO</mml:mi><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msub></mml:mrow></mml:math>ZrO2 -doped <mml:math display="inline"><mml:mrow><mml:msub><mml:mi>TiO</mml:mi><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msub></mml:mrow></mml:math>TiO2 retained the anatase crystal phase when zirconium substitution was below 10%. The doped film with 9:1 <mml:math display="inline"><mml:mrow><mml:mi>Ti</mml:mi><mml:mo>:</mml:mo><mml:mi>Zr</mml:mi></mml:mrow></mml:math>Ti:Zr pulse ratio has greater visible light absorption and a bandgap reduction of <mml:math display="inline"><mml:mrow><mml:mn>0.2</mml:mn><mml:mspace width="0.3em"></mml:mspace><mml:mi>eV</mml:mi></mml:mrow></mml:math>0.2eV . The photocatalytic decomposition efficiency under visible light irradiation was increased by 50% compared to undoped <mml:math display="inline"><mml:mrow><mml:msub><mml:mi>TiO</mml:mi><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msub></mml:mrow></mml:math>TiO2 .No biography provided yet