In this work, a versatile method is proposed to increase the sensitivity of optical sensors based on the localized surface plasmon resonance (LSPR) phenomenon. It combines a physical deposition method with the oblique angle deposition technique, allowing the preparation of plasmonic thin films with tailored porosity. Thin films of Au–TiO ₂ were deposited by reactive magnetron sputtering in a 3D nanostructure (zigzag growth), at different incidence angles (0° ≤ α ≤ 80°), followed by in-air thermal annealing at 400 °C to induce the growth of the Au nanoparticles. The roughness and surface porosity suffered a gradual increment by increasing the incidence angle. The resulting porous zigzag nanostructures that were obtained also decreased the principal refractive indexes (RIs) of the matrix and favoured the diffusion of Au through grain boundaries, originating broader nanoparticle size distributions. The transmittance minimum of the LSPR band appeared at around 600 nm, leading to a red-shift to about 626 nm for the highest incidence angle α = 80°, due to the presence of larger (scattering) nanoparticles. It is demonstrated that zigzag nanostructures can enhance adsorption sites for LSPR sensing by tailoring the porosity of the thin films. Atmosphere controlled transmittance-LSPR measurements showed that the RI sensitivity of the films is improved for higher incidence angles.

Thin films containing monometallic (Ag,Au) and bimetallic (Ag–Au) noble nanoparticles were dispersed in TiO ₂ , using reactive magnetron sputtering and post-deposition thermal annealing. The influence of metal concentration and thermal annealing in the (micro)structural evolution of the films was studied, and its correlation with the localized surface plasmon resonance (LSPR) and surface enhanced Raman spectroscopy (SERS) behaviours was evaluated. The Ag/TiO ₂ films presented columnar to granular microstructures, developing Ag clusters at the surface for higher annealing temperatures. In some cases, the films presented dendrite-type fractal geometry, which led to an almost flat broadband optical response. The Au/TiO ₂ system revealed denser microstructures, with Au nanoparticles dispersed in the matrix, whose size increased with annealing temperature. This microstructure led to the appearance of LSPR bands, although some Au segregation to the surface hindered this effect for higher concentrations. The structural results of the Ag–Au/TiO ₂ system suggested the formation of bimetallic Ag–Au nanoparticles, which presence was supported by the appearance of a single narrow LSPR band. In addition, the Raman spectra of Rhodamine-6G demonstrated the viability of these systems for SERS applications, with some indication that the Ag/TiO ₂ system might be preferential, contrasting to the notorious behaviour of the bimetallic system in terms of LSPR response.